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SiAlCN polymer precursor ceramic temperature sensor and preparation method thereof
The invention belongs to a SiAlCN polymer precursor ceramic temperature sensor and a preparation method thereof. The SiAlCN polymer precursor ceramic temperature sensor comprises a probe and a lead which is connected to the probe, and the probe is prepared from, by weight, 5-45 parts of organic precursor containing Al, 1-10 parts of curing agent and 45-94 parts of liquid ceramic precursor. According to the SiAlCN polymer precursor ceramic temperature sensor and the preparation method thereof, the preparation process is simple, the liquid SiAlCN polymer precursor has good flowability, and the sensor can be prepared simply, conveniently and quickly with low cost by means of the methods of micro casting, photoetching, MEMS and the like. In addition, the SiAlCN polymer precursor ceramic temperature sensor has the advantages of being small in size, high in precision, fast in response, long in service life and suitable for temperature measurement of high temperature harsh environments such as industrial furnaces, coal chemical industries and thermal power plants.
SiAlCN polymer precursor ceramic temperature sensor and preparation method thereof
The invention belongs to a SiAlCN polymer precursor ceramic temperature sensor and a preparation method thereof. The SiAlCN polymer precursor ceramic temperature sensor comprises a probe and a lead which is connected to the probe, and the probe is prepared from, by weight, 5-45 parts of organic precursor containing Al, 1-10 parts of curing agent and 45-94 parts of liquid ceramic precursor. According to the SiAlCN polymer precursor ceramic temperature sensor and the preparation method thereof, the preparation process is simple, the liquid SiAlCN polymer precursor has good flowability, and the sensor can be prepared simply, conveniently and quickly with low cost by means of the methods of micro casting, photoetching, MEMS and the like. In addition, the SiAlCN polymer precursor ceramic temperature sensor has the advantages of being small in size, high in precision, fast in response, long in service life and suitable for temperature measurement of high temperature harsh environments such as industrial furnaces, coal chemical industries and thermal power plants.
SiAlCN polymer precursor ceramic temperature sensor and preparation method thereof
SHAO GANG (author) / AN LI NAN (author) / ZHANG RUI (author) / FAN BINGBING (author) / WANG HAILONG (author) / CHEN DELIANG (author) / LU HONGXIA (author) / XU HONGLIANG (author) / ZHAO BIAO (author) / LI XINFANG (author)
2015-11-25
Patent
Electronic Resource
English
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