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Preparation method of polymer precursor ceramic high-temperature film sensor
The invention relates to the technical field of sensors, in particular to a preparation method of a polymer precursor ceramic high-temperature thin film sensor. The method comprises the following steps: covering a protective layer film on a polymer precursor ceramic sensing film, and connecting a lead to obtain the polymer precursor ceramic high-temperature film sensor. The preparation method of the polymer precursor ceramic sensing film comprises the following steps: coating the surface of a substrate with a precursor liquid to obtain a pasty polymer precursor film; and performing laser scanning on the pasty polymer precursor film, and performing ultrasonic treatment in an organic solvent to obtain the polymer precursor ceramic sensing film. According to the method, pyrolysis is synchronously realized in the patterning process, secondary pyrolysis is not needed, the process steps are saved, and the film sensor prepared by the method can resist the temperature as high as 1000 DEG C and is suitable for temperature and heat flow tests of high-temperature parts.
本发明涉及传感器技术领域，特别是涉及一种聚合物前驱体陶瓷高温薄膜传感器的制备方法。该方法在聚合物前驱体陶瓷传感薄膜上覆盖保护层薄膜，连接引线，得到所述聚合物前驱体陶瓷高温薄膜传感器。所述聚合物前驱体陶瓷传感薄膜的制备方法包括以下步骤：将前驱体液涂覆到衬底表面，得到浆状聚合物前驱体薄膜；对所述浆状聚合物前驱体薄膜进行激光扫描，之后于有机溶剂中超声，得到聚合物前驱体陶瓷传感薄膜。本发明图案化的过程同步实现了热解，无需再次热解，节省了工艺步骤，利用本发明方法制备的薄膜传感器耐温最高达1000℃，适用于高温部件的温度和热流测试。
Preparation method of polymer precursor ceramic high-temperature film sensor
The invention relates to the technical field of sensors, in particular to a preparation method of a polymer precursor ceramic high-temperature thin film sensor. The method comprises the following steps: covering a protective layer film on a polymer precursor ceramic sensing film, and connecting a lead to obtain the polymer precursor ceramic high-temperature film sensor. The preparation method of the polymer precursor ceramic sensing film comprises the following steps: coating the surface of a substrate with a precursor liquid to obtain a pasty polymer precursor film; and performing laser scanning on the pasty polymer precursor film, and performing ultrasonic treatment in an organic solvent to obtain the polymer precursor ceramic sensing film. According to the method, pyrolysis is synchronously realized in the patterning process, secondary pyrolysis is not needed, the process steps are saved, and the film sensor prepared by the method can resist the temperature as high as 1000 DEG C and is suitable for temperature and heat flow tests of high-temperature parts.
本发明涉及传感器技术领域，特别是涉及一种聚合物前驱体陶瓷高温薄膜传感器的制备方法。该方法在聚合物前驱体陶瓷传感薄膜上覆盖保护层薄膜，连接引线，得到所述聚合物前驱体陶瓷高温薄膜传感器。所述聚合物前驱体陶瓷传感薄膜的制备方法包括以下步骤：将前驱体液涂覆到衬底表面，得到浆状聚合物前驱体薄膜；对所述浆状聚合物前驱体薄膜进行激光扫描，之后于有机溶剂中超声，得到聚合物前驱体陶瓷传感薄膜。本发明图案化的过程同步实现了热解，无需再次热解，节省了工艺步骤，利用本发明方法制备的薄膜传感器耐温最高达1000℃，适用于高温部件的温度和热流测试。
Preparation method of polymer precursor ceramic high-temperature film sensor
一种聚合物前驱体陶瓷高温薄膜传感器的制备方法
CHOI JAE-BO (author) / DUAN WENJIN (author) / LUO HONGYAN (author) / ZHU JIEHONG (author) / GOU BOHUAI (author) / HUANG JIAHONG (author) / HUANG LIWEN (author) / WANG ZHONGHAI (author) / XU ZITONG (author) / CHEN XIAOJUN (author)
2024-08-06
Patent
Electronic Resource
Chinese
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