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Diamond-silicon carbide composite material, preparation method thereof and electronic equipment
The invention relates to a diamond-silicon carbide composite material, a preparation method thereof and electronic equipment, and the preparation method comprises the following steps: mixing diamond,a dispersant, a binder, a plasticizer and a solvent to prepare a tape casting slurry; carrying out tape casting treatment on the tape casting slurry to prepare a diamond preform; carrying out chemicalvapor infiltration silicon carbide treatment on the diamond preform to obtain a diamond-silicon carbide substrate; and carrying out hot pressed sintering treatment on the diamond-silicon carbide substrate. The diamond-silicon carbide composite material only contains two phases of diamond and silicon carbide, has the advantages of high density and high thermal conductivity, and is a good substitute product of an existing aluminum nitride substrate; and the method has the advantages of simple process, short production period, high automation degree and suitability for large-scale industrial production.
本发明涉及一种金刚石‑碳化硅复合材料及其制备方法、电子设备，制备方法包括以下步骤：将金刚石、分散剂、粘结剂、塑化剂和溶剂混合，制备流延浆料；对所述流延浆料进行流延成型处理，制备金刚石预成体；对所述金刚石预成体进行化学气相渗透碳化硅处理，得到金刚石‑碳化硅基板；对所述金刚石‑碳化硅基板进行热压烧结处理。该金刚石‑碳化硅复合材料仅含有金刚石和碳化硅两种物相，具有致密度高及热导率高的优点，是现有的氮化铝基板较好的替代产品；且该方法具有工艺简单，生产周期短，自动化程度高，适合大规模工业生产的优势。
Diamond-silicon carbide composite material, preparation method thereof and electronic equipment
The invention relates to a diamond-silicon carbide composite material, a preparation method thereof and electronic equipment, and the preparation method comprises the following steps: mixing diamond,a dispersant, a binder, a plasticizer and a solvent to prepare a tape casting slurry; carrying out tape casting treatment on the tape casting slurry to prepare a diamond preform; carrying out chemicalvapor infiltration silicon carbide treatment on the diamond preform to obtain a diamond-silicon carbide substrate; and carrying out hot pressed sintering treatment on the diamond-silicon carbide substrate. The diamond-silicon carbide composite material only contains two phases of diamond and silicon carbide, has the advantages of high density and high thermal conductivity, and is a good substitute product of an existing aluminum nitride substrate; and the method has the advantages of simple process, short production period, high automation degree and suitability for large-scale industrial production.
本发明涉及一种金刚石‑碳化硅复合材料及其制备方法、电子设备，制备方法包括以下步骤：将金刚石、分散剂、粘结剂、塑化剂和溶剂混合，制备流延浆料；对所述流延浆料进行流延成型处理，制备金刚石预成体；对所述金刚石预成体进行化学气相渗透碳化硅处理，得到金刚石‑碳化硅基板；对所述金刚石‑碳化硅基板进行热压烧结处理。该金刚石‑碳化硅复合材料仅含有金刚石和碳化硅两种物相，具有致密度高及热导率高的优点，是现有的氮化铝基板较好的替代产品；且该方法具有工艺简单，生产周期短，自动化程度高，适合大规模工业生产的优势。
Diamond-silicon carbide composite material, preparation method thereof and electronic equipment
金刚石-碳化硅复合材料及其制备方法、电子设备
HE XINBO (author) / LIU PENGFEI (author) / SHEN XUEWEI (author) / WU MAO (author)
2020-07-31
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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