A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Uncovering device for cavity, and semiconductor processing equipment
The invention discloses an uncovering device and semiconductor processing equipment. The uncovering device comprises a rotating mechanism and a transmission mechanism; the transmission mechanism comprises a driving rotating shaft and a driven rotating shaft arranged on the inner side of the driving rotating shaft in a sleeved mode and rotatably connected with the driving rotating shaft, the driving rotating shaft is connected with the rotating mechanism, and the driven rotating shaft is used for being connected with a cover plate; and one or more sealing cavities are arranged between the driving rotating shaft and the driven rotating shaft, each sealing cavity comprises two or more sub cavity bodies which mutually communicate at intervals, and the interior of each sub cavity body containsa fluid so that damping fluids flowing in the second preset direction can be formed between the sub cavity bodies of each sealing cavity when the movement condition of the driving rotating shaft is suddenly changed in the first preset direction so as to smooth movement of the driven rotating shaft, wherein the first preset direction and the second preset direction are opposite or the same. Smoothmovement of the driven rotating shaft can be guaranteed with the help of the damping fluids formed in all the cavity bodies, the phenomenon of rapid stop is reduced, and damage caused to a part due toimpact is prevented.
本发明公开了一种开盖装置和半导体处理设备。包括旋转机构；传动机构，包括主动旋转轴以及套设在主动旋转轴内侧并与其可转动连接的从动旋转轴，主动旋转轴与旋转机构连接，从动旋转轴用于与盖板连接；并且，主动旋转轴与从动旋转轴之间设置有至少一个密封腔，每个密封腔均包括间隔且相互连通的至少两个子腔室，子腔室内均容纳有流体，以在主动旋转轴的运动工况沿第一预定方向发生突然改变时，各密封腔内的子腔室之间能够形成沿第二预定方向流动的阻尼流体，以平缓从动旋转轴的运动；其中，第一预定方向与第二预定方向相反或相同。可以借助各子腔室内所形成的阻尼流体，确保从动旋转轴平缓运动，减少急速停止的现象，防止发生冲击，损坏部件。
Uncovering device for cavity, and semiconductor processing equipment
The invention discloses an uncovering device and semiconductor processing equipment. The uncovering device comprises a rotating mechanism and a transmission mechanism; the transmission mechanism comprises a driving rotating shaft and a driven rotating shaft arranged on the inner side of the driving rotating shaft in a sleeved mode and rotatably connected with the driving rotating shaft, the driving rotating shaft is connected with the rotating mechanism, and the driven rotating shaft is used for being connected with a cover plate; and one or more sealing cavities are arranged between the driving rotating shaft and the driven rotating shaft, each sealing cavity comprises two or more sub cavity bodies which mutually communicate at intervals, and the interior of each sub cavity body containsa fluid so that damping fluids flowing in the second preset direction can be formed between the sub cavity bodies of each sealing cavity when the movement condition of the driving rotating shaft is suddenly changed in the first preset direction so as to smooth movement of the driven rotating shaft, wherein the first preset direction and the second preset direction are opposite or the same. Smoothmovement of the driven rotating shaft can be guaranteed with the help of the damping fluids formed in all the cavity bodies, the phenomenon of rapid stop is reduced, and damage caused to a part due toimpact is prevented.
本发明公开了一种开盖装置和半导体处理设备。包括旋转机构；传动机构，包括主动旋转轴以及套设在主动旋转轴内侧并与其可转动连接的从动旋转轴，主动旋转轴与旋转机构连接，从动旋转轴用于与盖板连接；并且，主动旋转轴与从动旋转轴之间设置有至少一个密封腔，每个密封腔均包括间隔且相互连通的至少两个子腔室，子腔室内均容纳有流体，以在主动旋转轴的运动工况沿第一预定方向发生突然改变时，各密封腔内的子腔室之间能够形成沿第二预定方向流动的阻尼流体，以平缓从动旋转轴的运动；其中，第一预定方向与第二预定方向相反或相同。可以借助各子腔室内所形成的阻尼流体，确保从动旋转轴平缓运动，减少急速停止的现象，防止发生冲击，损坏部件。
Uncovering device for cavity, and semiconductor processing equipment
腔室用开盖装置和半导体处理设备
SUN JINBO (author) / SUN ZHIKUN (author)
2020-09-01
Patent
Electronic Resource
Chinese
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