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A platform for research: civil engineering, architecture and urbanism
Sealing door device for semiconductor equipment vacuum cavity
The invention discloses a sealing door device for a semiconductor equipment vacuum cavity. The sealing door device comprises a door plate, a lifting driving piece and two rows of lifting guide rails, wherein the two rows of lifting guide rails are arranged on the two sides of an opening of the vacuum cavity, lifting sliding blocks are arranged on the lifting guide rails, elastic pieces in a stretching state are connected between the lifting sliding blocks and the door plate, door opening and closing guide rails are arranged between the door plate and the lifting guide rails, the door plate is provided with supporting pieces located on the door opening and closing guide rails, the door opening and closing guide rails are provided with guiding parts used for guiding the door plate to deviate towards the side where the vacuum cavity is located, and the lifting driving piece is connected with the door plate and can deviate towards the side where the vacuum cavity is located along with the door plate. The sealing door device has the advantages of simple structure, small occupied space, low cost and the like.
本发明公开了一种半导体设备真空腔体密封门装置，包括门板、升降驱动件及两列升降导轨，两列所述升降导轨分设于真空腔体开口处的两侧，升降导轨上设有升降滑块，所述升降滑块与所述门板之间连接有处于拉伸状态的弹性件，所述门板与升降导轨之间设有开关门导轨，所述门板上设有定位于开关门导轨上的支撑件，所述开关门导轨上设有用于引导门板向真空腔体所在的一侧偏移的引导部，所述升降驱动件与门板相连且可随门板向真空腔体所在的一侧偏移。本发明具有结构简单、占用空间少、成本低等优点。
Sealing door device for semiconductor equipment vacuum cavity
The invention discloses a sealing door device for a semiconductor equipment vacuum cavity. The sealing door device comprises a door plate, a lifting driving piece and two rows of lifting guide rails, wherein the two rows of lifting guide rails are arranged on the two sides of an opening of the vacuum cavity, lifting sliding blocks are arranged on the lifting guide rails, elastic pieces in a stretching state are connected between the lifting sliding blocks and the door plate, door opening and closing guide rails are arranged between the door plate and the lifting guide rails, the door plate is provided with supporting pieces located on the door opening and closing guide rails, the door opening and closing guide rails are provided with guiding parts used for guiding the door plate to deviate towards the side where the vacuum cavity is located, and the lifting driving piece is connected with the door plate and can deviate towards the side where the vacuum cavity is located along with the door plate. The sealing door device has the advantages of simple structure, small occupied space, low cost and the like.
本发明公开了一种半导体设备真空腔体密封门装置，包括门板、升降驱动件及两列升降导轨，两列所述升降导轨分设于真空腔体开口处的两侧，升降导轨上设有升降滑块，所述升降滑块与所述门板之间连接有处于拉伸状态的弹性件，所述门板与升降导轨之间设有开关门导轨，所述门板上设有定位于开关门导轨上的支撑件，所述开关门导轨上设有用于引导门板向真空腔体所在的一侧偏移的引导部，所述升降驱动件与门板相连且可随门板向真空腔体所在的一侧偏移。本发明具有结构简单、占用空间少、成本低等优点。
Sealing door device for semiconductor equipment vacuum cavity
一种半导体设备真空腔体密封门装置
SHE PENGCHENG (author) / CHENG WENJIN (author) / PENG HUADONG (author) / FAN JIANGHUA (author) / GONG JUN (author)
2021-05-04
Patent
Electronic Resource
Chinese
IPC:
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
/
E05D
Scharniere oder andere Aufhängevorrichtungen für Türen, Fenster oder Flügel
,
HINGES OR OTHER SUSPENSION DEVICES FOR DOORS, WINDOWS, OR WINGS
/
E05F
DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION
,
Vorrichtungen zum Bewegen der Flügel in die Offen- oder Schließstellung
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
Vacuum sealing door plate structure for transmission cavity
| European Patent Office | 2022