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Sintering process of Al2O3 ceramic substrate
The invention belongs to a sintering process of an Al2O3 ceramic substrate. The sintering process is characterized by comprising the following manufacturing steps: A detecting the size of the ceramicsubstrate; B carrying outgreen firing on the substrate with the qualified size, the temperature change range of green firing being as follows: the initial temperature being 120 DEG C, the temperaturebeing gradually reduced to 120 DEG C after the highest temperature is 1665 DEG C, and the green firing time being 56 hours; C after the step B, desanding the sintered substrate, and performing densitydetection after desanding is finished; D after the density detection in the step C is finished, carrying out primary white piece separation; E carrying out pressure sintering on the primarily separated white pieces; F after pressure sintering in the step E is completed, grinding the substrate subjected to pressure sintering, and performing size detection after grinding; G calcining after the sizein the step F is detected to be qualified; and H carrying out white piece component treatment on the substrate calcined in the step G.
本发明属于一种Al2O3陶瓷基片烧结工艺，其特征在于制造步骤如下：A.对陶瓷基片进行尺寸检测；B.将尺寸合格的基片进行生烧，所述生烧的温度变化范围为：初始120度，到达最高温度1665度之后逐步降温到120度，生烧时间为56小时；C.步骤B之后将生烧后的基片进行除砂，除砂完毕之后进行密度检测；D.步骤C中密度检测完毕之后进行白片初分步骤；E.对初分后的白片进行压烧；F.待步骤E中压烧完毕之后对经过压烧的基片进行磨片，打磨之后进行尺寸检测；G.待步骤F中尺寸检测合格之后进行煅烧；H.将经过步骤G煅烧之后的基片进行白片成分。
Sintering process of Al2O3 ceramic substrate
The invention belongs to a sintering process of an Al2O3 ceramic substrate. The sintering process is characterized by comprising the following manufacturing steps: A detecting the size of the ceramicsubstrate; B carrying outgreen firing on the substrate with the qualified size, the temperature change range of green firing being as follows: the initial temperature being 120 DEG C, the temperaturebeing gradually reduced to 120 DEG C after the highest temperature is 1665 DEG C, and the green firing time being 56 hours; C after the step B, desanding the sintered substrate, and performing densitydetection after desanding is finished; D after the density detection in the step C is finished, carrying out primary white piece separation; E carrying out pressure sintering on the primarily separated white pieces; F after pressure sintering in the step E is completed, grinding the substrate subjected to pressure sintering, and performing size detection after grinding; G calcining after the sizein the step F is detected to be qualified; and H carrying out white piece component treatment on the substrate calcined in the step G.
本发明属于一种Al2O3陶瓷基片烧结工艺，其特征在于制造步骤如下：A.对陶瓷基片进行尺寸检测；B.将尺寸合格的基片进行生烧，所述生烧的温度变化范围为：初始120度，到达最高温度1665度之后逐步降温到120度，生烧时间为56小时；C.步骤B之后将生烧后的基片进行除砂，除砂完毕之后进行密度检测；D.步骤C中密度检测完毕之后进行白片初分步骤；E.对初分后的白片进行压烧；F.待步骤E中压烧完毕之后对经过压烧的基片进行磨片，打磨之后进行尺寸检测；G.待步骤F中尺寸检测合格之后进行煅烧；H.将经过步骤G煅烧之后的基片进行白片成分。
Sintering process of Al2O3 ceramic substrate
一种Al2O3陶瓷基片烧结工艺
CHENG BIAO (author) / TIAN MAOBIAO (author) / LIU RUISHENG (author) / ZHOU KAIMING (author) / XU YONG (author)
2020-12-15
Patent
Electronic Resource
Chinese
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