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Production process of high alpha-phase silicon nitride powder
The invention discloses a production process of high alpha-phase silicon nitride powder. The production process comprises the following steps of A, grinding and crushing silicon powder until D90 is 6mum, B, loading the ground silicon powder into a sagger, wherein the loading thickness is 15-30 mm, C, stacking a plurality of saggars filled with the silicon powder into a pile up and down, wherein the sum of the thicknesses of the silicon powder in the saggars in the stacked pile is less than or equal to 300 mm, D, putting a plurality of stacks of saggars filled with silicon powder into a vacuumheating furnace, E, pumping the air pressure of the vacuum heating furnace to 100 Pa or below, F, introducing nitrogen to 60 kPa, G, carrying out a heating reaction, and H, closing the system heating, and cooling the vacuum heating furnace to reduce the temperature of the system to normal temperature within 15-20 hours, and I, taking out a reaction product, crushing and grinding into powder. By adopting the process provided by the invention, the silicon nitride powder with the alpha-phase content of more than 95% can be obtained.
一种高α相氮化硅粉体的生产工艺，包括以下步骤：A：将硅粉研磨粉碎至D90为6μm；B：将研磨好的硅粉装入匣钵中，装料厚度在15‑30mm之间；C：将多个装好硅粉的匣钵上下叠放成一摞，叠放后的一摞中的各匣钵中硅粉的厚度总和小于等于300mm；D：将多摞装好硅粉的匣钵放入真空加热炉；E：将真空加热炉气压抽到100Pa以下；F：充入氮气至60kPa；G：升温反应，H：关闭系统加热，冷却真空加热炉，使系统在15至20小时降温至常温；I：取出反应产物粉碎、研磨为粉体。采用本发明的工艺可以得到α相含量超过95%的氮化硅粉体。
Production process of high alpha-phase silicon nitride powder
The invention discloses a production process of high alpha-phase silicon nitride powder. The production process comprises the following steps of A, grinding and crushing silicon powder until D90 is 6mum, B, loading the ground silicon powder into a sagger, wherein the loading thickness is 15-30 mm, C, stacking a plurality of saggars filled with the silicon powder into a pile up and down, wherein the sum of the thicknesses of the silicon powder in the saggars in the stacked pile is less than or equal to 300 mm, D, putting a plurality of stacks of saggars filled with silicon powder into a vacuumheating furnace, E, pumping the air pressure of the vacuum heating furnace to 100 Pa or below, F, introducing nitrogen to 60 kPa, G, carrying out a heating reaction, and H, closing the system heating, and cooling the vacuum heating furnace to reduce the temperature of the system to normal temperature within 15-20 hours, and I, taking out a reaction product, crushing and grinding into powder. By adopting the process provided by the invention, the silicon nitride powder with the alpha-phase content of more than 95% can be obtained.
一种高α相氮化硅粉体的生产工艺，包括以下步骤：A：将硅粉研磨粉碎至D90为6μm；B：将研磨好的硅粉装入匣钵中，装料厚度在15‑30mm之间；C：将多个装好硅粉的匣钵上下叠放成一摞，叠放后的一摞中的各匣钵中硅粉的厚度总和小于等于300mm；D：将多摞装好硅粉的匣钵放入真空加热炉；E：将真空加热炉气压抽到100Pa以下；F：充入氮气至60kPa；G：升温反应，H：关闭系统加热，冷却真空加热炉，使系统在15至20小时降温至常温；I：取出反应产物粉碎、研磨为粉体。采用本发明的工艺可以得到α相含量超过95%的氮化硅粉体。
Production process of high alpha-phase silicon nitride powder
一种高α相氮化硅粉体的生产工艺
XIA JINGHAO (author) / XIA FAN (author)
2021-01-22
Patent
Electronic Resource
Chinese
Alpha-phase silicon nitride powder and preparation method thereof
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