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Gel casting preparation method of tungsten oxide-based ceramic target material
The invention relates to a gel casting preparation method of a tungsten oxide-based ceramic target material, which comprises the following steps: raw material preparation: mixed powder, namely mixed powder containing high-purity tungsten oxide and doping source powder, wherein a doping source is selected from at least three of Ti, Mo, V, Al, Li and Zr, the purity of the mixed powder is greater than 99.95%, the average particle size is 500nm and 1800nm, and the D50 particle size is 200-750nm; wherein the quantitative relation of M1, M2, M3, M4 and M5 accords with a formula in the specification:preparing a premixed solution; preparing high-fluidity slurry; preparing a biscuit; degumming the biscuit; sintering; taking out the sintered blank after heat preservation; and machining or not performing machining according to needs. The method can be used for preparing the tungsten oxide-based ceramic target material which is low in process cost, good in conductivity, relatively high in purity,fine in grain size and high in density.
本发明涉及一种氧化钨基陶瓷靶材材料的凝胶注模成型制备方法，包括以下步骤：原料准备：混合粉体、包含高纯氧化钨和掺杂源粉体的混合粉体，掺杂源选自Ti、Mo、V、Al、Li、Zr中的至少三种，所述混合粉体的纯度大于99.95％，平均粒径500nm‑1800nm，D50粒径在200‑750nm；M1、M2、M3、M4、M5的数量关系符合公式：制备预混液；制备高流动性浆料；制备素坯；素坯脱胶；烧结；保温结束取出烧坯；根据需要进行或不进行机加工。该种方法能够制备工艺成本低、导电性良好、纯度较高、晶粒尺寸细小、致密度高的氧化钨基陶瓷靶材材料。
Gel casting preparation method of tungsten oxide-based ceramic target material
The invention relates to a gel casting preparation method of a tungsten oxide-based ceramic target material, which comprises the following steps: raw material preparation: mixed powder, namely mixed powder containing high-purity tungsten oxide and doping source powder, wherein a doping source is selected from at least three of Ti, Mo, V, Al, Li and Zr, the purity of the mixed powder is greater than 99.95%, the average particle size is 500nm and 1800nm, and the D50 particle size is 200-750nm; wherein the quantitative relation of M1, M2, M3, M4 and M5 accords with a formula in the specification:preparing a premixed solution; preparing high-fluidity slurry; preparing a biscuit; degumming the biscuit; sintering; taking out the sintered blank after heat preservation; and machining or not performing machining according to needs. The method can be used for preparing the tungsten oxide-based ceramic target material which is low in process cost, good in conductivity, relatively high in purity,fine in grain size and high in density.
本发明涉及一种氧化钨基陶瓷靶材材料的凝胶注模成型制备方法，包括以下步骤：原料准备：混合粉体、包含高纯氧化钨和掺杂源粉体的混合粉体，掺杂源选自Ti、Mo、V、Al、Li、Zr中的至少三种，所述混合粉体的纯度大于99.95％，平均粒径500nm‑1800nm，D50粒径在200‑750nm；M1、M2、M3、M4、M5的数量关系符合公式：制备预混液；制备高流动性浆料；制备素坯；素坯脱胶；烧结；保温结束取出烧坯；根据需要进行或不进行机加工。该种方法能够制备工艺成本低、导电性良好、纯度较高、晶粒尺寸细小、致密度高的氧化钨基陶瓷靶材材料。
Gel casting preparation method of tungsten oxide-based ceramic target material
一种氧化钨基陶瓷靶材材料的凝胶注模成型制备方法
GAO MING (author) / ZHANG HU (author) / ZHANG HUARUI (author) / YANG BENRUN (author)
2021-02-19
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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