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Low-temperature ceramic sintering powder process for chip packaging and bonding
The invention discloses a low-temperature ceramic sintering powder process for chip packaging and bonding, which comprises the following steps: S1, mixing solid materials required by ceramic, adding water, and pulverizing and grinding the materials; S2, standing the ground materials, naturally drying the materials into powder cake, and grinding the powder cake into powder by a grinder to obtain ceramic powder; s3, mixing the ceramic powder obtained in the S2 with an adhesive, and mixing the components to obtain a standby material; S4, carrying out powder cold press molding on the standby material to obtain a blank; S5, putting a molded sample into a multi-stage baking device, and carrying out hot press sintering at the temperatures of 200-600 DEG C, 600-1000 DEG C and 1000-1600 DEG C in sequence; S6, cooling the sintered product in a natural air cooling manner, and packaging the final product. According to the method, the formed sample is put into the multi-stage baking device for hot-pressing sintering, and with the gradual increase of the temperature, clear layering can be ensured after the texture of a blank is changed during baking, a better blank forming effect is ensured, andtherefore, the quality of ceramic powder is ensured.
本发明公开了一种用于芯片封装键合低温陶瓷烧结粉体工艺,包括如下步骤,步骤S1:将陶瓷所需的固体材料混合,加水后进行粉碎研磨,步骤S2:将研磨后的材料静置,自然干燥成粉饼,然后通过研磨机研磨成粉,得到陶瓷粉剂,步骤S3:将S2中获得的陶瓷粉剂混入粘合剂,混合成备用料,步骤S4:将备用料通过粉体冷压成型制成胚体,步骤S5:然后将成型样品放入多等级烘烤装置进行热压烧结,炉内温度依次200‑600℃,600‑1000℃和1000‑1600℃,步骤S6:在烧制成型后,通过自然风冷方式冷却,封装完成,通过将成型样品放入多等级烘烤装置进行热压烧结,随着温度的逐级升高,能够保证坯料烘烤时质地发生变化后,层次分明,保证坯料成型效果更好,保证陶瓷粉体质量。
Low-temperature ceramic sintering powder process for chip packaging and bonding
The invention discloses a low-temperature ceramic sintering powder process for chip packaging and bonding, which comprises the following steps: S1, mixing solid materials required by ceramic, adding water, and pulverizing and grinding the materials; S2, standing the ground materials, naturally drying the materials into powder cake, and grinding the powder cake into powder by a grinder to obtain ceramic powder; s3, mixing the ceramic powder obtained in the S2 with an adhesive, and mixing the components to obtain a standby material; S4, carrying out powder cold press molding on the standby material to obtain a blank; S5, putting a molded sample into a multi-stage baking device, and carrying out hot press sintering at the temperatures of 200-600 DEG C, 600-1000 DEG C and 1000-1600 DEG C in sequence; S6, cooling the sintered product in a natural air cooling manner, and packaging the final product. According to the method, the formed sample is put into the multi-stage baking device for hot-pressing sintering, and with the gradual increase of the temperature, clear layering can be ensured after the texture of a blank is changed during baking, a better blank forming effect is ensured, andtherefore, the quality of ceramic powder is ensured.
本发明公开了一种用于芯片封装键合低温陶瓷烧结粉体工艺,包括如下步骤,步骤S1:将陶瓷所需的固体材料混合,加水后进行粉碎研磨,步骤S2:将研磨后的材料静置,自然干燥成粉饼,然后通过研磨机研磨成粉,得到陶瓷粉剂,步骤S3:将S2中获得的陶瓷粉剂混入粘合剂,混合成备用料,步骤S4:将备用料通过粉体冷压成型制成胚体,步骤S5:然后将成型样品放入多等级烘烤装置进行热压烧结,炉内温度依次200‑600℃,600‑1000℃和1000‑1600℃,步骤S6:在烧制成型后,通过自然风冷方式冷却,封装完成,通过将成型样品放入多等级烘烤装置进行热压烧结,随着温度的逐级升高,能够保证坯料烘烤时质地发生变化后,层次分明,保证坯料成型效果更好,保证陶瓷粉体质量。
Low-temperature ceramic sintering powder process for chip packaging and bonding
一种用于芯片封装键合低温陶瓷烧结粉体工艺
GAO YANLING (author) / DONG JINYONG (author)
2021-03-30
Patent
Electronic Resource
Chinese
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