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The invention relates to a method for preparing a large-size oxide target material through oxide slurry splicing and secondary sintering. According to the core process of the technology, oxide slurry is adopted for bonding a sintered small-size oxide ceramic target material, then pressing and drying are carried out, secondary high-temperature sintering is carried out, and the large-size plane and super-long annular target material can be prepared according to requirements. The technology has the advantages that the defects that gaps exist between target materials, a large amount of charges are accumulated, the target materials are prone to blackening, the film transmittance is deteriorated, and the film resistance is increased due to the fact that a plurality of small target materials are used for welding in part of enterprises at present are overcome; and target materials with different shapes and different sizes can be prepared according to market requirements so as to adapt to different thin film deposition equipment.
本公开涉及一种氧化物浆料拼接二次烧结制备大尺寸氧化物靶材的方法。该技术的核心工艺是采用氧化物浆料对已经烧结好的小尺寸氧化物陶瓷靶材进行粘结，随后压紧烘干，进行二次高温烧结，可根据需求制备出大尺寸平面和超长环形靶材。该技术的优势在于不仅解决了当今部分企业利用多片小块靶材进行焊接的途径来制造大尺寸靶材所造成的靶材之间存在缝隙从而聚集大量电荷，使靶材易于黑化，进而恶化薄膜透过率，增大薄膜电阻等缺陷；还可以根据市场需求制备不同形状不同尺寸靶材以适应不同的薄膜沉积设备。
The invention relates to a method for preparing a large-size oxide target material through oxide slurry splicing and secondary sintering. According to the core process of the technology, oxide slurry is adopted for bonding a sintered small-size oxide ceramic target material, then pressing and drying are carried out, secondary high-temperature sintering is carried out, and the large-size plane and super-long annular target material can be prepared according to requirements. The technology has the advantages that the defects that gaps exist between target materials, a large amount of charges are accumulated, the target materials are prone to blackening, the film transmittance is deteriorated, and the film resistance is increased due to the fact that a plurality of small target materials are used for welding in part of enterprises at present are overcome; and target materials with different shapes and different sizes can be prepared according to market requirements so as to adapt to different thin film deposition equipment.
本公开涉及一种氧化物浆料拼接二次烧结制备大尺寸氧化物靶材的方法。该技术的核心工艺是采用氧化物浆料对已经烧结好的小尺寸氧化物陶瓷靶材进行粘结，随后压紧烘干，进行二次高温烧结，可根据需求制备出大尺寸平面和超长环形靶材。该技术的优势在于不仅解决了当今部分企业利用多片小块靶材进行焊接的途径来制造大尺寸靶材所造成的靶材之间存在缝隙从而聚集大量电荷，使靶材易于黑化，进而恶化薄膜透过率，增大薄膜电阻等缺陷；还可以根据市场需求制备不同形状不同尺寸靶材以适应不同的薄膜沉积设备。
Method for preparing large-size oxide target material through oxide slurry splicing and secondary sintering
一种氧化物浆料拼接二次烧结制备大尺寸氧化物靶材的方法
2021-04-09
Patent
Electronic Resource
Chinese
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