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Gradient silicon carbide coating on graphite surface and preparation method thereof
The invention discloses a gradient silicon carbide coating on a graphite surface and a preparation method thereof. The method comprises the following steps that S1, adding nanometer silicon powder into liquid polycarbosilane, conducting ultrasonic oscillation for even mixing to obtain liquid polycarbosilane containing the silicon powder, pressurizing and dipping a graphite sample into liquid polycarbosilane containing silicon powder, taking out the graphite sample, and conducting curing and cracking to form a primary silicon carbide coating on the graphite surface; and S2, depositing a secondary silicon carbide coating on the surface of the primary silicon carbide coating obtained in the step S1 by adopting a chemical vapor deposition method so as to allow the primary silicon carbide coating and the secondary silicon carbide coating to form the gradient silicon carbide coating on the graphite surface. According to the invention, the silicon powder is added into the polycarbosilane, is solidified and distributed on the surface of the graphite along with the polycarbosilane, and reacts with the graphite on the surface at a temperature of 1,650 DEG C to 1,800 DEG C to generate silicon carbide, so the bonding strength of the coating and a graphite matrix is enhanced, and influence on the growth of subsequent CVD SiC is avoided.
本发明公开了一种石墨表面梯度碳化硅涂层及其制备方法,方法包括以下步骤:S1:将纳米硅粉加入液态聚碳硅烷中,超声震荡混合均匀,得到含有硅粉的液态聚碳硅烷;将石墨试样加压浸渍于含有硅粉的液态聚碳硅烷中,取出后固化、裂解,从而在石墨表面形成初级碳化硅涂层。S2:采用化学气相沉积法在步骤S1的初级碳化硅涂层表面沉积次级碳化硅涂层,从而初级碳化硅涂层和次级碳化硅涂层形成石墨表面的梯度碳化硅涂层。本发明通过在聚碳硅烷中加入硅粉,硅粉随着聚碳硅烷固化分布在石墨表面,在1650℃‑1800℃与表面石墨反应生成碳化硅,既增强了涂层与石墨基体的结合强度,又避免影响后续CVD SiC的生长。
Gradient silicon carbide coating on graphite surface and preparation method thereof
The invention discloses a gradient silicon carbide coating on a graphite surface and a preparation method thereof. The method comprises the following steps that S1, adding nanometer silicon powder into liquid polycarbosilane, conducting ultrasonic oscillation for even mixing to obtain liquid polycarbosilane containing the silicon powder, pressurizing and dipping a graphite sample into liquid polycarbosilane containing silicon powder, taking out the graphite sample, and conducting curing and cracking to form a primary silicon carbide coating on the graphite surface; and S2, depositing a secondary silicon carbide coating on the surface of the primary silicon carbide coating obtained in the step S1 by adopting a chemical vapor deposition method so as to allow the primary silicon carbide coating and the secondary silicon carbide coating to form the gradient silicon carbide coating on the graphite surface. According to the invention, the silicon powder is added into the polycarbosilane, is solidified and distributed on the surface of the graphite along with the polycarbosilane, and reacts with the graphite on the surface at a temperature of 1,650 DEG C to 1,800 DEG C to generate silicon carbide, so the bonding strength of the coating and a graphite matrix is enhanced, and influence on the growth of subsequent CVD SiC is avoided.
本发明公开了一种石墨表面梯度碳化硅涂层及其制备方法,方法包括以下步骤:S1:将纳米硅粉加入液态聚碳硅烷中,超声震荡混合均匀,得到含有硅粉的液态聚碳硅烷;将石墨试样加压浸渍于含有硅粉的液态聚碳硅烷中,取出后固化、裂解,从而在石墨表面形成初级碳化硅涂层。S2:采用化学气相沉积法在步骤S1的初级碳化硅涂层表面沉积次级碳化硅涂层,从而初级碳化硅涂层和次级碳化硅涂层形成石墨表面的梯度碳化硅涂层。本发明通过在聚碳硅烷中加入硅粉,硅粉随着聚碳硅烷固化分布在石墨表面,在1650℃‑1800℃与表面石墨反应生成碳化硅,既增强了涂层与石墨基体的结合强度,又避免影响后续CVD SiC的生长。
Gradient silicon carbide coating on graphite surface and preparation method thereof
一种石墨表面梯度碳化硅涂层及其制备方法
LIU JIABAO (author) / CHEN ZHAOFENG (author) / WANG YANG (author) / YU SHENGJIE (author) / PAN YING (author) / CHAI PAN (author) / WAN QIANG (author)
2021-04-09
Patent
Electronic Resource
Chinese
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