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The invention discloses a graphite base disc surface gradient TaC coating and a preparation method thereof. The graphite base disc surface gradient TaC coating comprises a graphite base disc base body, wherein the surface of the graphite base disc base body is provided with a gradient TaC coating, the gradient TaC coating comprises a TaC component and a C component, the content of the TaC component is gradually increased to 100% from 0% from inside to outside, and the gradient distribution conforms to a y=ax linear equation rule or conforms to y=ax<2> parabolic rule distribution. According tothe invention, a CVD dynamic co-deposition technology is utilized to realize gradient spanning of TaC component content in a coating from 0 to 100%, and due to the fact that the inner layer of the coating is a pyrolytic carbon layer, the pyrolytic carbon layer has a thermal expansion coefficient similar to that of a graphite matrix and then is gradually transited, so that the thermal matching difference between the coating and the matrix can be effectively improved; and the soft C component structure and nano pores in the coating can effectively relieve thermal expansion of TaC crystals so asto reduce a stress peak value in the coating.
本发明公开了一种石墨基座盘表面梯度TaC涂层及其制备方法,包括石墨基座盘基体,石墨基座盘基体的表面设有梯度TaC涂层;梯度TaC涂层包括TaC组份和C组份,TaC组份含量从内至外从0%逐渐增加到100%,且梯度分布符合y=ax线性方程规律或者符合y=ax2抛物线性规律分布。本发明利用CVD动态共沉积技术,实现涂层中TaC组分含量从0‑100%的梯度跨越,由于涂层内层为热解炭层,其与石墨基体热膨胀系数相近,随后逐渐过渡,可有效改善涂层与基体之间的热匹配差异;同时涂层中软质C组份结构和纳米孔隙可有效缓解TaC晶体的热膨胀,以降低涂层内的应力峰值。
The invention discloses a graphite base disc surface gradient TaC coating and a preparation method thereof. The graphite base disc surface gradient TaC coating comprises a graphite base disc base body, wherein the surface of the graphite base disc base body is provided with a gradient TaC coating, the gradient TaC coating comprises a TaC component and a C component, the content of the TaC component is gradually increased to 100% from 0% from inside to outside, and the gradient distribution conforms to a y=ax linear equation rule or conforms to y=ax<2> parabolic rule distribution. According tothe invention, a CVD dynamic co-deposition technology is utilized to realize gradient spanning of TaC component content in a coating from 0 to 100%, and due to the fact that the inner layer of the coating is a pyrolytic carbon layer, the pyrolytic carbon layer has a thermal expansion coefficient similar to that of a graphite matrix and then is gradually transited, so that the thermal matching difference between the coating and the matrix can be effectively improved; and the soft C component structure and nano pores in the coating can effectively relieve thermal expansion of TaC crystals so asto reduce a stress peak value in the coating.
本发明公开了一种石墨基座盘表面梯度TaC涂层及其制备方法,包括石墨基座盘基体,石墨基座盘基体的表面设有梯度TaC涂层;梯度TaC涂层包括TaC组份和C组份,TaC组份含量从内至外从0%逐渐增加到100%,且梯度分布符合y=ax线性方程规律或者符合y=ax2抛物线性规律分布。本发明利用CVD动态共沉积技术,实现涂层中TaC组分含量从0‑100%的梯度跨越,由于涂层内层为热解炭层,其与石墨基体热膨胀系数相近,随后逐渐过渡,可有效改善涂层与基体之间的热匹配差异;同时涂层中软质C组份结构和纳米孔隙可有效缓解TaC晶体的热膨胀,以降低涂层内的应力峰值。
Graphite base disc surface gradient TaC coating and preparation method thereof
一种石墨基座盘表面梯度TaC涂层及其制备方法
2021-02-19
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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