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Heater SiC-ZrC-BN composite coating for monocrystalline silicon furnace and preparation method
The invention discloses a heater SiC-ZrC-BN composite coating for a monocrystalline silicon furnace and a preparation method. The preparation method comprises the following steps: grinding Si powder, Zr powder, boron nitride powder, graphite powder and ZrO2 powder in a ball mill to obtain mixed powder; putting a heating part of the heater for the monocrystalline silicon furnace into a graphite box, and covering the heating part with the mixed powder; and placing the graphite box in a vacuum furnace to be subjected to embedding infiltration treatment, so as to acquire the SiC-ZrC-BN composite coating. The SiC-ZrC-BN composite coating is added to the heater heating body, corrosion of the silicon-rich atmosphere to the heating body is reduced, the binding force between the coating and the heating body and the thermal shock resistance of the coating are improved by controlling the components of the coating, monocrystalline silicon is prevented from being polluted in the production process, the quality of the monocrystalline silicon is improved, the high-temperature stability and the service life of the heater can be effectively improved, and the production cost is reduced.
本发明公开了一种单晶硅炉用加热器SiC‑ZrC‑BN复合涂层及制备方法，制备方法包括如下步骤：将Si粉、Zr粉、氮化硼粉、石墨粉和ZrO2粉放入球磨机中研磨，得到混合粉体；将单晶硅炉用加热器的加热部件置于石墨盒中，将混合粉末覆盖加热部件；将石墨盒置于真空炉中进行包埋渗处理，得到所述SiC‑ZrC‑BN复合涂层。本发明通过对加热器发热体增加SiC‑ZrC‑BN复合涂层，降低了富硅气氛对发热体的侵蚀，通过控制涂层的成分提高涂层与发热体的结合力以及涂层的抗热震性，避免生产过程中污染单晶硅，提高单晶硅质量，且能够有效的增加了加热器高温稳定性以及使用寿命，降低生产成本。
Heater SiC-ZrC-BN composite coating for monocrystalline silicon furnace and preparation method
The invention discloses a heater SiC-ZrC-BN composite coating for a monocrystalline silicon furnace and a preparation method. The preparation method comprises the following steps: grinding Si powder, Zr powder, boron nitride powder, graphite powder and ZrO2 powder in a ball mill to obtain mixed powder; putting a heating part of the heater for the monocrystalline silicon furnace into a graphite box, and covering the heating part with the mixed powder; and placing the graphite box in a vacuum furnace to be subjected to embedding infiltration treatment, so as to acquire the SiC-ZrC-BN composite coating. The SiC-ZrC-BN composite coating is added to the heater heating body, corrosion of the silicon-rich atmosphere to the heating body is reduced, the binding force between the coating and the heating body and the thermal shock resistance of the coating are improved by controlling the components of the coating, monocrystalline silicon is prevented from being polluted in the production process, the quality of the monocrystalline silicon is improved, the high-temperature stability and the service life of the heater can be effectively improved, and the production cost is reduced.
本发明公开了一种单晶硅炉用加热器SiC‑ZrC‑BN复合涂层及制备方法，制备方法包括如下步骤：将Si粉、Zr粉、氮化硼粉、石墨粉和ZrO2粉放入球磨机中研磨，得到混合粉体；将单晶硅炉用加热器的加热部件置于石墨盒中，将混合粉末覆盖加热部件；将石墨盒置于真空炉中进行包埋渗处理，得到所述SiC‑ZrC‑BN复合涂层。本发明通过对加热器发热体增加SiC‑ZrC‑BN复合涂层，降低了富硅气氛对发热体的侵蚀，通过控制涂层的成分提高涂层与发热体的结合力以及涂层的抗热震性，避免生产过程中污染单晶硅，提高单晶硅质量，且能够有效的增加了加热器高温稳定性以及使用寿命，降低生产成本。
Heater SiC-ZrC-BN composite coating for monocrystalline silicon furnace and preparation method
一种单晶硅炉用加热器SiC-ZrC-BN复合涂层及制备方法
CHEN ZHENG (author) / SHAN CAIXIA (author) / CHEN QIANG (author) / FAN YU (author) / WANG RUJIANG (author) / LIU YUYU (author) / XU JIE (author) / ZHANG PING (author) / WU YAJUAN (author) / ZHENG JIAZHEN (author)
2021-04-13
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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