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Heater with SiC-ZrC-B4C-BN composite coating for monocrystalline silicon furnace and preparation method thereof
The invention relates to a heater with an SiC-ZrC-B4C-BN composite coating for a monocrystalline silicon furnace and a preparation method thereof, the heater for a monocrystalline silicon furnace comprises a heating part, and the heating part is coated with the SiC-ZrC-B4C-BN composite coating. The SiC-ZrC-B4C-BN composite coating is added to the heating part of the heater, corrosion of the silicon-rich atmosphere to the heating part is reduced, the binding force of the coating and the heating part and the thermal shock resistance of the coating are improved by controlling the components of the coating, monocrystalline silicon is prevented from being polluted in the production process, the quality of the monocrystalline silicon is improved, the high-temperature stability and the service life of the heater can be effectively improved, and the production cost is reduced.
本发明涉及一种具有SiC‑ZrC‑B4C‑BN复合涂层的单晶硅炉用加热器及制备方法，所述单晶硅炉用加热器包括加热部件，加热部件上覆有SiC‑ZrC‑B4C‑BN复合涂层。本发明通过对加热器加热部件增加SiC‑ZrC‑B4C‑BN复合涂层，降低了富硅气氛对加热部件的侵蚀，通过控制涂层的成分提高涂层与加热部件的结合力以及涂层的抗热震性，避免生产过程中污染单晶硅，提高单晶硅质量，且能够有效的增加了加热器高温稳定性以及使用寿命，降低生产成本。
Heater with SiC-ZrC-B4C-BN composite coating for monocrystalline silicon furnace and preparation method thereof
The invention relates to a heater with an SiC-ZrC-B4C-BN composite coating for a monocrystalline silicon furnace and a preparation method thereof, the heater for a monocrystalline silicon furnace comprises a heating part, and the heating part is coated with the SiC-ZrC-B4C-BN composite coating. The SiC-ZrC-B4C-BN composite coating is added to the heating part of the heater, corrosion of the silicon-rich atmosphere to the heating part is reduced, the binding force of the coating and the heating part and the thermal shock resistance of the coating are improved by controlling the components of the coating, monocrystalline silicon is prevented from being polluted in the production process, the quality of the monocrystalline silicon is improved, the high-temperature stability and the service life of the heater can be effectively improved, and the production cost is reduced.
本发明涉及一种具有SiC‑ZrC‑B4C‑BN复合涂层的单晶硅炉用加热器及制备方法，所述单晶硅炉用加热器包括加热部件，加热部件上覆有SiC‑ZrC‑B4C‑BN复合涂层。本发明通过对加热器加热部件增加SiC‑ZrC‑B4C‑BN复合涂层，降低了富硅气氛对加热部件的侵蚀，通过控制涂层的成分提高涂层与加热部件的结合力以及涂层的抗热震性，避免生产过程中污染单晶硅，提高单晶硅质量，且能够有效的增加了加热器高温稳定性以及使用寿命，降低生产成本。
Heater with SiC-ZrC-B4C-BN composite coating for monocrystalline silicon furnace and preparation method thereof
一种具有SiC-ZrC-B4C-BN复合涂层的单晶硅炉用加热器及制备方法
ZHENG JIAZHEN (author) / CHEN ZHENG (author) / CHEN QIANG (author) / ZHANG PING (author) / FAN YU (author) / XU JIE (author) / HE YEZENG (author) / FAN HELIANG (author)
2021-04-16
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
Heater SiC-ZrC-BN composite coating for monocrystalline silicon furnace and preparation method
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