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SiC-ZrC-B4C-ZrB2-BN composite coating of heater for monocrystalline silicon furnace and preparation method thereof
The invention discloses a SiC-ZrC-B4C-ZrB2-BN composite coating of a heater for a monocrystalline silicon furnace and a preparation method thereof. The SiC-ZrC-B4C-ZrB2-BN composite coating is coated on the surface of a heating part of the heater for a monocrystalline silicon furnace. The SiC-ZrC-B4C-ZrB2-BN composite coating is added to the heating part of the heater, corrosion of the silicon-rich atmosphere to the heating part is reduced, the binding force between the coating and a heating body and the thermal shock resistance of the coating are improved by controlling the components of the coating, monocrystalline silicon is prevented from being polluted in the production process, the quality of the monocrystalline silicon is improved, the high-temperature stability and the service life of the heater can be effectively improved, and the production cost is reduced.
本发明公开了一种单晶硅炉用加热器SiC‑ZrC‑B4C‑ZrB2‑BN复合涂层及制备方法，所述SiC‑ZrC‑B4C‑ZrB2‑BN复合涂层覆于单晶硅炉用加热器的加热部件的表面。本发明通过对加热器的加热部件增加SiC‑ZrC‑B4C‑ZrB2‑BN复合涂层，降低了富硅气氛对加热部件的侵蚀，通过控制涂层的成分提高涂层与发热体的结合力以及涂层的抗热震性，避免生产过程中污染单晶硅，提高单晶硅质量，且能够有效的增加了加热器高温稳定性以及使用寿命，降低生产成本。
SiC-ZrC-B4C-ZrB2-BN composite coating of heater for monocrystalline silicon furnace and preparation method thereof
The invention discloses a SiC-ZrC-B4C-ZrB2-BN composite coating of a heater for a monocrystalline silicon furnace and a preparation method thereof. The SiC-ZrC-B4C-ZrB2-BN composite coating is coated on the surface of a heating part of the heater for a monocrystalline silicon furnace. The SiC-ZrC-B4C-ZrB2-BN composite coating is added to the heating part of the heater, corrosion of the silicon-rich atmosphere to the heating part is reduced, the binding force between the coating and a heating body and the thermal shock resistance of the coating are improved by controlling the components of the coating, monocrystalline silicon is prevented from being polluted in the production process, the quality of the monocrystalline silicon is improved, the high-temperature stability and the service life of the heater can be effectively improved, and the production cost is reduced.
本发明公开了一种单晶硅炉用加热器SiC‑ZrC‑B4C‑ZrB2‑BN复合涂层及制备方法，所述SiC‑ZrC‑B4C‑ZrB2‑BN复合涂层覆于单晶硅炉用加热器的加热部件的表面。本发明通过对加热器的加热部件增加SiC‑ZrC‑B4C‑ZrB2‑BN复合涂层，降低了富硅气氛对加热部件的侵蚀，通过控制涂层的成分提高涂层与发热体的结合力以及涂层的抗热震性，避免生产过程中污染单晶硅，提高单晶硅质量，且能够有效的增加了加热器高温稳定性以及使用寿命，降低生产成本。
SiC-ZrC-B4C-ZrB2-BN composite coating of heater for monocrystalline silicon furnace and preparation method thereof
一种单晶硅炉用加热器SiC-ZrC-B4C-ZrB2-BN复合涂层及制备方法
SHAN CAIXIA (author) / CHEN ZHENG (author) / FAN YU (author) / CHEN QIANG (author) / ZHANG PING (author) / SHI XIAO (author) / GU-SHEN XIANGYU (author) / XU JIE (author) / WU YAJUAN (author) / ZHENG JIAZHEN (author)
2021-04-16
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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