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Preparation method of carbon/carbon liner for natural gas chemical vapor deposition furnace
The invention discloses a preparation method of a carbon/carbon liner for a natural gas chemical vapor deposition furnace, which comprises the following steps: by using a carbon fiber needled body as a preform material, carrying out resin brushing treatment, chemical vapor deposition densification and complete assembly. The method comprises the following specific steps: 1, taking a carbon fiber needled body as a preform material; 2, hardening and shaping; 3, preparing and brushing resin impregnation liquid; 4, curing/carbonizing treatment; 5, performing chemical vapor deposition densification; 6, assembling complete set. The carbon/carbon composite material is used as the inner container of the natural gas chemical vapor deposition furnace, has the characteristics of high temperature resistance, high strength, good heat insulation performance, difficulty in layering and the like, is simple in process, low in manufacturing cost, long in service life and difficult to deform, greatly prolongs the service life of the chemical vapor deposition furnace, greatly improves the safety performance of the chemical vapor deposition furnace, and can protect electrodes of the deposition furnace; and the replacement rate of electrode materials is reduced.
本发明公开了一种天然气化学气相沉积炉用炭/炭内胆的制备方法,采用炭纤维针刺体作为预制体材料,经过树脂涂刷处理、化学气相沉积致密以及成套组装的工艺过程。该方法具体步骤为:一、采用炭纤维针刺体作为预制体材料;二、硬化定型;三、树脂浸渍液的配置及涂刷;四、固化/炭化处理;五、化学气相沉积致密;六、组装成套。本发明采用炭/炭复合材料作为天然气化学气相沉积炉内胆,具有耐高温、强度高、隔热性能好且不易分层等特点,并且工艺简单、制造成本低、使用寿命长、不容易变形,大大提高化学气相沉积炉的使用寿命和安全性能,同时可以保护沉积炉电极,减少电极材料的更换率。
Preparation method of carbon/carbon liner for natural gas chemical vapor deposition furnace
The invention discloses a preparation method of a carbon/carbon liner for a natural gas chemical vapor deposition furnace, which comprises the following steps: by using a carbon fiber needled body as a preform material, carrying out resin brushing treatment, chemical vapor deposition densification and complete assembly. The method comprises the following specific steps: 1, taking a carbon fiber needled body as a preform material; 2, hardening and shaping; 3, preparing and brushing resin impregnation liquid; 4, curing/carbonizing treatment; 5, performing chemical vapor deposition densification; 6, assembling complete set. The carbon/carbon composite material is used as the inner container of the natural gas chemical vapor deposition furnace, has the characteristics of high temperature resistance, high strength, good heat insulation performance, difficulty in layering and the like, is simple in process, low in manufacturing cost, long in service life and difficult to deform, greatly prolongs the service life of the chemical vapor deposition furnace, greatly improves the safety performance of the chemical vapor deposition furnace, and can protect electrodes of the deposition furnace; and the replacement rate of electrode materials is reduced.
本发明公开了一种天然气化学气相沉积炉用炭/炭内胆的制备方法,采用炭纤维针刺体作为预制体材料,经过树脂涂刷处理、化学气相沉积致密以及成套组装的工艺过程。该方法具体步骤为:一、采用炭纤维针刺体作为预制体材料;二、硬化定型;三、树脂浸渍液的配置及涂刷;四、固化/炭化处理;五、化学气相沉积致密;六、组装成套。本发明采用炭/炭复合材料作为天然气化学气相沉积炉内胆,具有耐高温、强度高、隔热性能好且不易分层等特点,并且工艺简单、制造成本低、使用寿命长、不容易变形,大大提高化学气相沉积炉的使用寿命和安全性能,同时可以保护沉积炉电极,减少电极材料的更换率。
Preparation method of carbon/carbon liner for natural gas chemical vapor deposition furnace
一种天然气化学气相沉积炉用炭/炭内胆的制备方法
GAO DA'EN (author) / SHAO HAICHENG (author)
2021-04-30
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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