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Rapid chemical vapor deposition method for carbon-carbon products
The invention is suitable for the technical field of photovoltaic thermal field product manufacturing, and provides a rapid carbon-carbon product chemical vapor deposition method which comprises the steps of heating a carbon-carbon product blank, forming pyrolytic carbon on the surface of the carbon-carbon product blank, adjusting the ventilation flow of carbon source gas and auxiliary gas, and cooling, taking out and packaging the carbon-carbon product. The device solves the problems that the time of the whole technological process cannot be effectively shortened in the chemical vapor deposition process of an existing carbon-carbon product, and the residence time of a carbon source gas and an auxiliary gas in a CVD (Chemical Vapor Deposition) furnace in a reaction chamber cannot be prolonged while the carbon source gas and the auxiliary gas are introduced; the problems that the carbon source gas absorption rate of the carbon-carbon product blank is reduced, the deposition depth of the carbon-carbon product blank cannot be improved and the production efficiency of the carbon-carbon product is reduced due to the fact that the carbon source gas absorption rate of the carbon-carbon product blank is reduced are solved, and the purposes of improving the carbon source gas absorption rate, increasing the deposition depth of the carbon-carbon product blank, shortening the time in the whole process and accelerating the production efficiency of the carbon-carbon product are achieved.
本发明适用于光伏热场产品制造技术领域，提供了一种快速化学气相沉积碳碳制品方法，包括碳碳制品坯体的加热过程、碳碳制品坯体表面热解碳的形成、碳源气体和辅助气体通气流量的调整和碳碳制品的冷却取出及包装，该装置解决了现有的碳碳制品在进行化学气相沉积的过程中无法有效地缩短整个工艺过程中的时间，且在通入碳源气体和辅助气体的同时无法增加碳源气体和辅助气体在CVD气相沉积炉在反应室内部的滞留时间，导致碳碳制品坯体的碳源气体吸收率降低，无法提高碳碳制品坯体沉积深度，降低了碳碳制品的生产效率的问题，达到并提高碳源气体吸收率，增加了碳碳制品坯体沉积深度，缩短了整个过程中的时间，加快了碳碳制品的生产效率。
Rapid chemical vapor deposition method for carbon-carbon products
The invention is suitable for the technical field of photovoltaic thermal field product manufacturing, and provides a rapid carbon-carbon product chemical vapor deposition method which comprises the steps of heating a carbon-carbon product blank, forming pyrolytic carbon on the surface of the carbon-carbon product blank, adjusting the ventilation flow of carbon source gas and auxiliary gas, and cooling, taking out and packaging the carbon-carbon product. The device solves the problems that the time of the whole technological process cannot be effectively shortened in the chemical vapor deposition process of an existing carbon-carbon product, and the residence time of a carbon source gas and an auxiliary gas in a CVD (Chemical Vapor Deposition) furnace in a reaction chamber cannot be prolonged while the carbon source gas and the auxiliary gas are introduced; the problems that the carbon source gas absorption rate of the carbon-carbon product blank is reduced, the deposition depth of the carbon-carbon product blank cannot be improved and the production efficiency of the carbon-carbon product is reduced due to the fact that the carbon source gas absorption rate of the carbon-carbon product blank is reduced are solved, and the purposes of improving the carbon source gas absorption rate, increasing the deposition depth of the carbon-carbon product blank, shortening the time in the whole process and accelerating the production efficiency of the carbon-carbon product are achieved.
本发明适用于光伏热场产品制造技术领域，提供了一种快速化学气相沉积碳碳制品方法，包括碳碳制品坯体的加热过程、碳碳制品坯体表面热解碳的形成、碳源气体和辅助气体通气流量的调整和碳碳制品的冷却取出及包装，该装置解决了现有的碳碳制品在进行化学气相沉积的过程中无法有效地缩短整个工艺过程中的时间，且在通入碳源气体和辅助气体的同时无法增加碳源气体和辅助气体在CVD气相沉积炉在反应室内部的滞留时间，导致碳碳制品坯体的碳源气体吸收率降低，无法提高碳碳制品坯体沉积深度，降低了碳碳制品的生产效率的问题，达到并提高碳源气体吸收率，增加了碳碳制品坯体沉积深度，缩短了整个过程中的时间，加快了碳碳制品的生产效率。
Rapid chemical vapor deposition method for carbon-carbon products
一种快速化学气相沉积碳碳制品方法
LI JIANGTAO (author) / WANG CHONGPU (author) / LIU CHUNMAO (author) / SONG HONGWEI (author) / GAO YUNHAO (author) / ZHAO LIJIE (author) / ZHANG YANFENG (author) / ZHANG XIAOQI (author) / ZHANG JIE (author) / WANG SHENGLI (author)
2024-01-09
Patent
Electronic Resource
Chinese
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