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Vacuum sealing door device of semiconductor equipment
The invention discloses a vacuum sealing door device of semiconductor equipment. The vacuum sealing door device comprises a vacuum cavity, a vacuum door and a lifting pressing mechanism, the lifting pressing mechanism comprises a lifting drive, a guide frame and two lifting sliding rails, the two lifting sliding rails are fixed to the side walls of the two sides of a doorway of the vacuum cavity correspondingly, and the guide frame comprises two guide plates and a connecting base; the two guide plates are symmetrically fixed to the two ends of the connecting base, the two guide plates are arranged on the corresponding lifting sliding rails in a sliding manner respectively, the connecting base is arranged at the driving end of the lifting drive, vacuum door connecting plates are arranged atthe two sides of the vacuum door, and each vacuum door connecting plate is connected with the corresponding guide plate through an inclined pulling piece; and the two ends of the inclined pulling pieces are hinged to the vacuum door connecting plates and the guide plates correspondingly, and tension springs are further arranged between the vacuum door connecting plates and the guide plates. The vacuum sealing door device has the advantages that the cost is greatly reduced, the structure is simplified, and the relative motion friction between the vacuum door and the vacuum cavity is avoided.
本发明公开了一种半导体设备的真空密封门装置，包括真空腔体、真空门和升降压紧机构，升降压紧机构包括升降驱动、导向架和两个升降滑轨，两个升降滑轨分别固定在真空腔体的门口两侧的侧壁上，导向架包括两个导向板和连接座，两个导向板对称固定在连接座的两端，两个导向板分别滑设在对应的升降滑轨上，连接座设于升降驱动的驱动端，所述真空门两侧设有真空门连接板，各真空门连接板通过斜拉件与对应的导向板连接，且斜拉件的两端分别铰接在真空门连接板和导向板上，真空门连接板与导向板之间还设有拉力弹簧。本发明具有大大降低了成本、简化了结构、避免了真空门与真空腔体之间相对运动摩擦的优点。
Vacuum sealing door device of semiconductor equipment
The invention discloses a vacuum sealing door device of semiconductor equipment. The vacuum sealing door device comprises a vacuum cavity, a vacuum door and a lifting pressing mechanism, the lifting pressing mechanism comprises a lifting drive, a guide frame and two lifting sliding rails, the two lifting sliding rails are fixed to the side walls of the two sides of a doorway of the vacuum cavity correspondingly, and the guide frame comprises two guide plates and a connecting base; the two guide plates are symmetrically fixed to the two ends of the connecting base, the two guide plates are arranged on the corresponding lifting sliding rails in a sliding manner respectively, the connecting base is arranged at the driving end of the lifting drive, vacuum door connecting plates are arranged atthe two sides of the vacuum door, and each vacuum door connecting plate is connected with the corresponding guide plate through an inclined pulling piece; and the two ends of the inclined pulling pieces are hinged to the vacuum door connecting plates and the guide plates correspondingly, and tension springs are further arranged between the vacuum door connecting plates and the guide plates. The vacuum sealing door device has the advantages that the cost is greatly reduced, the structure is simplified, and the relative motion friction between the vacuum door and the vacuum cavity is avoided.
本发明公开了一种半导体设备的真空密封门装置，包括真空腔体、真空门和升降压紧机构，升降压紧机构包括升降驱动、导向架和两个升降滑轨，两个升降滑轨分别固定在真空腔体的门口两侧的侧壁上，导向架包括两个导向板和连接座，两个导向板对称固定在连接座的两端，两个导向板分别滑设在对应的升降滑轨上，连接座设于升降驱动的驱动端，所述真空门两侧设有真空门连接板，各真空门连接板通过斜拉件与对应的导向板连接，且斜拉件的两端分别铰接在真空门连接板和导向板上，真空门连接板与导向板之间还设有拉力弹簧。本发明具有大大降低了成本、简化了结构、避免了真空门与真空腔体之间相对运动摩擦的优点。
Vacuum sealing door device of semiconductor equipment
一种半导体设备的真空密封门装置
SHE PENGCHENG (author) / GONG JUN (author) / ZHANG SHUANGJING (author)
2020-12-15
Patent
Electronic Resource
Chinese
IPC:
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
/
E05F
DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION
,
Vorrichtungen zum Bewegen der Flügel in die Offen- oder Schließstellung
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
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