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High-modulus cordierite-based low-thermal-expansion ceramic and preparation method thereof
The invention discloses high-modulus cordierite-based low-thermal-expansion ceramic, which is prepared from the following substances in percentage by weight: 74.5 to 81 percent of cordierite high-purity powder, 7 to 15 percent of a thermal expansion coefficient regulator, 2.5 to 9 percent of an elastic modulus regulator and 0.5 to 1.5 percent of a sintering aid. The high-modulus cordierite-based low-thermal-expansion ceramic has the beneficial effects that the high-modulus cordierite-based low-thermal-expansion ceramic is relatively good in compactness, the compactness is greater than or equal to 97%, and the elastic modulus is greater than or equal to 140 GPa; aiming at the field of photoetching machine application, the invention provides the preparation method of the high-modulus cordierite-based ceramic material with the ultralow thermal expansion coefficient at the photoetching machine operation temperature (the temperature point is close to 20 DEG C), the whole preparation process is simple, the operation is easy, the cost is relatively low, and industrialization is easy to realize.
本发明公开了一种高模量堇青石基低热膨胀陶瓷，由以下重量分数的物质组成：堇青石高纯粉74.5％‑81％、热膨胀系数调节剂7‑15％、弹性模量调节剂2.5％‑9％和助烧剂0.5‑1.5％。本发明的有益效果是：本发明高模量堇青石基低热膨胀陶瓷致密性较好，其致密度≥97％，弹性模量≥140GPa；针对光刻机应用领域，本发明提拱了一种光刻机操作温度下(20℃附近温度点)具备超低热膨胀系数的高模量堇青石基陶瓷材料制备方法，整体制备工艺简单，易操作，成本较低，易于实现产业化。
High-modulus cordierite-based low-thermal-expansion ceramic and preparation method thereof
The invention discloses high-modulus cordierite-based low-thermal-expansion ceramic, which is prepared from the following substances in percentage by weight: 74.5 to 81 percent of cordierite high-purity powder, 7 to 15 percent of a thermal expansion coefficient regulator, 2.5 to 9 percent of an elastic modulus regulator and 0.5 to 1.5 percent of a sintering aid. The high-modulus cordierite-based low-thermal-expansion ceramic has the beneficial effects that the high-modulus cordierite-based low-thermal-expansion ceramic is relatively good in compactness, the compactness is greater than or equal to 97%, and the elastic modulus is greater than or equal to 140 GPa; aiming at the field of photoetching machine application, the invention provides the preparation method of the high-modulus cordierite-based ceramic material with the ultralow thermal expansion coefficient at the photoetching machine operation temperature (the temperature point is close to 20 DEG C), the whole preparation process is simple, the operation is easy, the cost is relatively low, and industrialization is easy to realize.
本发明公开了一种高模量堇青石基低热膨胀陶瓷，由以下重量分数的物质组成：堇青石高纯粉74.5％‑81％、热膨胀系数调节剂7‑15％、弹性模量调节剂2.5％‑9％和助烧剂0.5‑1.5％。本发明的有益效果是：本发明高模量堇青石基低热膨胀陶瓷致密性较好，其致密度≥97％，弹性模量≥140GPa；针对光刻机应用领域，本发明提拱了一种光刻机操作温度下(20℃附近温度点)具备超低热膨胀系数的高模量堇青石基陶瓷材料制备方法，整体制备工艺简单，易操作，成本较低，易于实现产业化。
High-modulus cordierite-based low-thermal-expansion ceramic and preparation method thereof
一种高模量堇青石基低热膨胀陶瓷及其制备方法
ZHANG CONG (author) / CAO JIANWU (author) / WANG CHENG (author) / GUO JIANBIN (author) / LIU FAFU (author) / ZHOU YAWEI (author) / MAN PENG (author) / GUO ZAIZAI (author) / BAO YUGUANG (author) / WANG YANLI (author)
2021-06-01
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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