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Production process of ultrathin aluminum nitride ceramic substrate
The invention relates to the technical field of aluminum nitride ceramics, and provides a production process of an ultrathin aluminum nitride ceramic substrate. The process comprises the following steps: (1) uniformly mixing aluminum nitride powder, a composite sintering aid, a UV monomer, a reactive diluent, a photoinitiator, a dispersant and a silane coupling agent to obtain ceramic slurry; (2) subjecting the ceramic slurry to tape casting on a tape casting machine, initiating a polymerization reaction through ultraviolet radiation, subjecting the slurry to in-situ curing molding to obtain a ceramic green body, and then cutting the ceramic green body into required shapes and sizes through a mold to obtain ceramic green sheets; (3) laminating the ceramic green sheets, and putting the laminated ceramic green sheets into a glue discharging furnace for glue discharging; and (4) carrying out hot pressed sintering on the ceramic blank sheet after glue discharging under the protection of nitrogen atmosphere, cooling to room temperature after the sintering, and then carrying out powder removal and polishing processes to obtain the ultrathin aluminum nitride ceramic substrate. The prepared aluminum nitride ceramic substrate is ultrathin, good in thermal conductivity and high in bending strength.
本发明涉及氮化铝陶瓷技术领域，提供一种超薄氮化铝陶瓷基片的生产工艺，包括以下步骤：(1)将氮化铝粉体、复合烧结助剂、UV单体、活性稀释剂、光引发剂、分散剂、硅烷偶联剂混合均匀，得到陶瓷浆料；(2)所述陶瓷浆料在流延机上流延后，通过紫外照射引发聚合反应，浆料原位固化成型，得到陶瓷生坯，再将陶瓷生坯用模具切成需要的形状和尺寸，得到陶瓷坯片；(3)将陶瓷坯片进行叠层后放入排胶炉内进行排胶；(4)排胶后的陶瓷坯片在氮气气氛保护下进行热压烧结，烧结后冷却至室温，再进行除粉抛光工艺，即得到超薄氮化铝陶瓷基片。制备的氮化铝陶瓷基片厚度超薄、导热性好、抗弯强度高。
Production process of ultrathin aluminum nitride ceramic substrate
The invention relates to the technical field of aluminum nitride ceramics, and provides a production process of an ultrathin aluminum nitride ceramic substrate. The process comprises the following steps: (1) uniformly mixing aluminum nitride powder, a composite sintering aid, a UV monomer, a reactive diluent, a photoinitiator, a dispersant and a silane coupling agent to obtain ceramic slurry; (2) subjecting the ceramic slurry to tape casting on a tape casting machine, initiating a polymerization reaction through ultraviolet radiation, subjecting the slurry to in-situ curing molding to obtain a ceramic green body, and then cutting the ceramic green body into required shapes and sizes through a mold to obtain ceramic green sheets; (3) laminating the ceramic green sheets, and putting the laminated ceramic green sheets into a glue discharging furnace for glue discharging; and (4) carrying out hot pressed sintering on the ceramic blank sheet after glue discharging under the protection of nitrogen atmosphere, cooling to room temperature after the sintering, and then carrying out powder removal and polishing processes to obtain the ultrathin aluminum nitride ceramic substrate. The prepared aluminum nitride ceramic substrate is ultrathin, good in thermal conductivity and high in bending strength.
本发明涉及氮化铝陶瓷技术领域，提供一种超薄氮化铝陶瓷基片的生产工艺，包括以下步骤：(1)将氮化铝粉体、复合烧结助剂、UV单体、活性稀释剂、光引发剂、分散剂、硅烷偶联剂混合均匀，得到陶瓷浆料；(2)所述陶瓷浆料在流延机上流延后，通过紫外照射引发聚合反应，浆料原位固化成型，得到陶瓷生坯，再将陶瓷生坯用模具切成需要的形状和尺寸，得到陶瓷坯片；(3)将陶瓷坯片进行叠层后放入排胶炉内进行排胶；(4)排胶后的陶瓷坯片在氮气气氛保护下进行热压烧结，烧结后冷却至室温，再进行除粉抛光工艺，即得到超薄氮化铝陶瓷基片。制备的氮化铝陶瓷基片厚度超薄、导热性好、抗弯强度高。
Production process of ultrathin aluminum nitride ceramic substrate
一种超薄氮化铝陶瓷基片的生产工艺
YANG DASHENG (author) / SHI CHUNXI (author) / FENG JIAWEI (author)
2021-06-01
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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