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Preparation method of ultra-thin large-size LTCC (Low Temperature Co-Fired Ceramic) substrate
The invention relates to a preparation method of an ultra-thin large-size LTCC (Low Temperature Co-Fired Ceramic) substrate. The preparation method comprises the following steps: mixing ZnO and Nb2O5 according to a molar ratio, pre-sintering and synthesizing to obtain a ZnNb2O6 system as a basic system; adjusting the dielectric constant of the material system by compounding a high-dielectric-constant TiO2 material; reducing the sintering temperature of the system by adding a sintering aid; reducing the particle size of the powder by introducing a sanding process, so that the specific surface area of the powder is increased, and the reaction activity of the powder is improved; adding a solvent, a dispersing agent and a defoaming agent into the powder obtained by sanding, carrying out primary ball milling to prepare slurry, supplementing a binder and a solvent, and carrying out secondary ball milling to prepare a casting material; and performing casting, laminating, isostatic pressing and cutting, and sintering and molding according to an LTCC (Low Temperature Co-Fired Ceramic) process. The problems of warping, edge curling, breaking and the like of an existing ultra-thin large-size ceramic substrate in the sintering process are solved. The ratio of the size to the thickness size of the prepared substrate can reach 5000: 1, and the method can be widely applied to the field of miniaturization of electronic components.
一种超薄大尺寸LTCC陶瓷基板的制备方法，通过ZnO和Nb2O5按摩尔配比混料预烧合成而获得的ZnNb2O6体系作为基础体系；通过复合高介电常数TiO2材料调整材料体系介电常数；通过添加烧结助剂降低体系烧结温度；通过引入砂磨工艺降低粉体粒径，使粉体比表面积增大，继而增大粉体的反应活性；在砂磨得到的粉体中，加入溶剂、分散剂和消泡剂进行一次球磨制备浆料，补入粘结剂、溶剂进行二次球磨制备流延料；流延、叠片、等静压、切割后按LTCC工艺烧结成型。解决了现有超薄大尺寸陶瓷基板在烧结过程中产生翘曲、卷边、破碎等问题。所制得基板尺寸与厚度尺寸的比例可达到5000∶1，在电子元器件小型化领域具有广泛的应用。
Preparation method of ultra-thin large-size LTCC (Low Temperature Co-Fired Ceramic) substrate
The invention relates to a preparation method of an ultra-thin large-size LTCC (Low Temperature Co-Fired Ceramic) substrate. The preparation method comprises the following steps: mixing ZnO and Nb2O5 according to a molar ratio, pre-sintering and synthesizing to obtain a ZnNb2O6 system as a basic system; adjusting the dielectric constant of the material system by compounding a high-dielectric-constant TiO2 material; reducing the sintering temperature of the system by adding a sintering aid; reducing the particle size of the powder by introducing a sanding process, so that the specific surface area of the powder is increased, and the reaction activity of the powder is improved; adding a solvent, a dispersing agent and a defoaming agent into the powder obtained by sanding, carrying out primary ball milling to prepare slurry, supplementing a binder and a solvent, and carrying out secondary ball milling to prepare a casting material; and performing casting, laminating, isostatic pressing and cutting, and sintering and molding according to an LTCC (Low Temperature Co-Fired Ceramic) process. The problems of warping, edge curling, breaking and the like of an existing ultra-thin large-size ceramic substrate in the sintering process are solved. The ratio of the size to the thickness size of the prepared substrate can reach 5000: 1, and the method can be widely applied to the field of miniaturization of electronic components.
一种超薄大尺寸LTCC陶瓷基板的制备方法，通过ZnO和Nb2O5按摩尔配比混料预烧合成而获得的ZnNb2O6体系作为基础体系；通过复合高介电常数TiO2材料调整材料体系介电常数；通过添加烧结助剂降低体系烧结温度；通过引入砂磨工艺降低粉体粒径，使粉体比表面积增大，继而增大粉体的反应活性；在砂磨得到的粉体中，加入溶剂、分散剂和消泡剂进行一次球磨制备浆料，补入粘结剂、溶剂进行二次球磨制备流延料；流延、叠片、等静压、切割后按LTCC工艺烧结成型。解决了现有超薄大尺寸陶瓷基板在烧结过程中产生翘曲、卷边、破碎等问题。所制得基板尺寸与厚度尺寸的比例可达到5000∶1，在电子元器件小型化领域具有广泛的应用。
Preparation method of ultra-thin large-size LTCC (Low Temperature Co-Fired Ceramic) substrate
一种超薄大尺寸LTCC陶瓷基板的制备方法
YUAN SHIFENG (author) / PANG JINBIAO (author) / HAN YUCHENG (author) / DOU ZHANMING (author) / SHU GUOJING (author)
2021-07-09
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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