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Non-pressure type constraint sintering method of LTCC (Low Temperature Co-Fired Ceramic) substrate
The invention discloses a non-pressure type constraint sintering method of an LTCC (Low Temperature Co-fired Ceramic) substrate, which comprises the following steps: arranging a forced pressing sheet on the upper surface of a green ceramic blank to forcibly pressurize a convex part when green ceramic lamination is carried out on the basis of an LTCC (Low Temperature Co-fired Ceramic) technology, so as to obtain an LTCC blank with a flat surface; the LTCC blank, the follow-up supporting block and the constraint pressing plate are placed on a load bearing plate according to the relative positions; the plurality of follow-up supporting blocks are uniformly arranged at the periphery of the LTCC blank body; the constraint pressing plate is arranged right above the LTCC blank body, is supported by the follow-up supporting block and is not in contact with the LTCC blank body; based on LTCC co-firing equipment and sintering conditions, the LTCC blank with the follow-up supporting block and the constraint pressing plate is sintered, and high-flatness LTCC substrate firing is achieved. According to the method, the warping condition of the substrate in the sintering process can be reduced, and the final flatness of the LTCC substrate is improved.
本发明公开了一种LTCC基板的无压式约束烧结方法,包括:基于LTCC即低温共烧陶瓷技术进行生瓷层压时,在生瓷胚体上表面设置强制压片对凸起部分强制加压,得到表面平整的LTCC胚体;将所述LTCC胚体、随动支撑块以及约束压板按照相对位置摆放在承烧板上;所述随动支撑块设置有多个,且均匀设置在LTCC胚体四周;所述约束压板设置在LTCC胚体正上方,并由随动支撑块支撑且不与LTCC胚体接触;基于LTCC共烧设备和烧结条件,对设置好随动支撑块和约束压板的LTCC胚体进行烧结,实现高平整度的LTCC陶瓷基板烧制。本发明可降低基板在烧结过程中的翘曲情况,提升LTCC基板最终平整度。
Non-pressure type constraint sintering method of LTCC (Low Temperature Co-Fired Ceramic) substrate
The invention discloses a non-pressure type constraint sintering method of an LTCC (Low Temperature Co-fired Ceramic) substrate, which comprises the following steps: arranging a forced pressing sheet on the upper surface of a green ceramic blank to forcibly pressurize a convex part when green ceramic lamination is carried out on the basis of an LTCC (Low Temperature Co-fired Ceramic) technology, so as to obtain an LTCC blank with a flat surface; the LTCC blank, the follow-up supporting block and the constraint pressing plate are placed on a load bearing plate according to the relative positions; the plurality of follow-up supporting blocks are uniformly arranged at the periphery of the LTCC blank body; the constraint pressing plate is arranged right above the LTCC blank body, is supported by the follow-up supporting block and is not in contact with the LTCC blank body; based on LTCC co-firing equipment and sintering conditions, the LTCC blank with the follow-up supporting block and the constraint pressing plate is sintered, and high-flatness LTCC substrate firing is achieved. According to the method, the warping condition of the substrate in the sintering process can be reduced, and the final flatness of the LTCC substrate is improved.
本发明公开了一种LTCC基板的无压式约束烧结方法,包括:基于LTCC即低温共烧陶瓷技术进行生瓷层压时,在生瓷胚体上表面设置强制压片对凸起部分强制加压,得到表面平整的LTCC胚体;将所述LTCC胚体、随动支撑块以及约束压板按照相对位置摆放在承烧板上;所述随动支撑块设置有多个,且均匀设置在LTCC胚体四周;所述约束压板设置在LTCC胚体正上方,并由随动支撑块支撑且不与LTCC胚体接触;基于LTCC共烧设备和烧结条件,对设置好随动支撑块和约束压板的LTCC胚体进行烧结,实现高平整度的LTCC陶瓷基板烧制。本发明可降低基板在烧结过程中的翘曲情况,提升LTCC基板最终平整度。
Non-pressure type constraint sintering method of LTCC (Low Temperature Co-Fired Ceramic) substrate
一种LTCC基板的无压式约束烧结方法
YUE SHUAIQI (author) / XU YANG (author) / WANG NA (author) / MEI YONGGUI (author) / ZHANG DEFU (author) / KUANG BO (author)
2024-11-05
Patent
Electronic Resource
Chinese
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