A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Treatment method of high-density ITO target material powder
The invention provides a treatment method of high-density ITO target material powder, which comprises the steps of firstly, adding tin oxide powder into a sand mill, adding deionized water, a dispersing agent and an additive for pre-grinding, and then adding deionized water, the dispersing agent and the additive into tin oxide slurry and indium oxide powder for sanding. The ratio of the addition amount of the dispersing agent in the step 2 to the total addition amount of the dispersing agent in the step 2 and the step 3 is less than or equal to 40%, so that one-time mixing pulping is adopted, the period is short, the density is obviously improved, and the product performance and the use efficiency of customers are improved.
本发明提供一种高密度ITO靶材粉末的处理方法，通过先对氧化锡粉末加入到砂磨机添加去离子水、分散剂和添加剂进行预磨，再将氧化锡浆料与氧化铟粉末添加去离子水、分散剂和添加剂进行砂磨，步骤二的分散剂添加量/步骤二+步骤三的分散剂添加量≤40%，这样采用一次混合成浆，周期短，密度提升明显，提升客户产品性能和使用效能。
Treatment method of high-density ITO target material powder
The invention provides a treatment method of high-density ITO target material powder, which comprises the steps of firstly, adding tin oxide powder into a sand mill, adding deionized water, a dispersing agent and an additive for pre-grinding, and then adding deionized water, the dispersing agent and the additive into tin oxide slurry and indium oxide powder for sanding. The ratio of the addition amount of the dispersing agent in the step 2 to the total addition amount of the dispersing agent in the step 2 and the step 3 is less than or equal to 40%, so that one-time mixing pulping is adopted, the period is short, the density is obviously improved, and the product performance and the use efficiency of customers are improved.
本发明提供一种高密度ITO靶材粉末的处理方法，通过先对氧化锡粉末加入到砂磨机添加去离子水、分散剂和添加剂进行预磨，再将氧化锡浆料与氧化铟粉末添加去离子水、分散剂和添加剂进行砂磨，步骤二的分散剂添加量/步骤二+步骤三的分散剂添加量≤40%，这样采用一次混合成浆，周期短，密度提升明显，提升客户产品性能和使用效能。
Treatment method of high-density ITO target material powder
高密度ITO靶材粉末的处理方法
MA JIANBAO (author) / WANG ZHIQIANG (author) / TAO CHENG (author) / ZENG DUNFENG (author) / SHENG MINGLIANG (author)
2021-12-17
Patent
Electronic Resource
Chinese
| European Patent Office | 2023
| European Patent Office | 2023
| European Patent Office | 2023
High-density target material and preparation method thereof
| European Patent Office | 2023