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Preparation method of high-density AZO target material
The invention discloses a preparation method of a high-density AZO target material, which specifically comprises the following steps: preparing AZO mixed powder by using zinc acetate dihydrate and aluminum nitrate nonahydrate as raw materials through a hydrothermal synthesis method, and fully infiltrating the AZO mixed powder with an acetic acid aqueous solution to obtain wetted AZO powder; the method comprises the following steps: wetting AZO powder, putting the wetted AZO powder into a mold, carrying out primary sintering to obtain a sintered blank, carrying out two-step pressureless sintering on the sintered blank to obtain a high-density sintered blank, and carrying out machining, copper back plate brazing, cleaning, drying and vacuum packaging on the sintered blank to obtain the AZO ceramic target material. The high-density AZO ceramic target material is prepared by adopting a two-step low-temperature sintering process, and the energy consumption and the production cost of the AZO target material can be reduced.
本发明公开了一种高致密度AZO靶材的制备方法，具体方法是以二水合乙酸锌、九水合硝酸铝为原料，经水热合成法制备AZO混合粉，将AZO混合粉以乙酸水溶液充分浸润，得到润湿后的AZO粉末；将润湿后的AZO粉末放入模具，经过一次烧结，得到烧结坯，对烧结坯进行二步无压烧结，得到高致密烧结坯，将烧结坯经过机械加工、钎焊铜背板、清洗、干燥、真空封装获得AZO陶瓷靶材。本发明采用二步低温烧结工艺制备出高致密度的AZO陶瓷靶材，能够降低AZO靶材的能耗和生产成本。
Preparation method of high-density AZO target material
The invention discloses a preparation method of a high-density AZO target material, which specifically comprises the following steps: preparing AZO mixed powder by using zinc acetate dihydrate and aluminum nitrate nonahydrate as raw materials through a hydrothermal synthesis method, and fully infiltrating the AZO mixed powder with an acetic acid aqueous solution to obtain wetted AZO powder; the method comprises the following steps: wetting AZO powder, putting the wetted AZO powder into a mold, carrying out primary sintering to obtain a sintered blank, carrying out two-step pressureless sintering on the sintered blank to obtain a high-density sintered blank, and carrying out machining, copper back plate brazing, cleaning, drying and vacuum packaging on the sintered blank to obtain the AZO ceramic target material. The high-density AZO ceramic target material is prepared by adopting a two-step low-temperature sintering process, and the energy consumption and the production cost of the AZO target material can be reduced.
本发明公开了一种高致密度AZO靶材的制备方法，具体方法是以二水合乙酸锌、九水合硝酸铝为原料，经水热合成法制备AZO混合粉，将AZO混合粉以乙酸水溶液充分浸润，得到润湿后的AZO粉末；将润湿后的AZO粉末放入模具，经过一次烧结，得到烧结坯，对烧结坯进行二步无压烧结，得到高致密烧结坯，将烧结坯经过机械加工、钎焊铜背板、清洗、干燥、真空封装获得AZO陶瓷靶材。本发明采用二步低温烧结工艺制备出高致密度的AZO陶瓷靶材，能够降低AZO靶材的能耗和生产成本。
Preparation method of high-density AZO target material
一种高致密度AZO靶材的制备方法
LI ZHAOYANG (author) / LI BIN (author) / LI JIWEN (author) / SHANGGUAN LINJIAN (author) / NIE FUQUAN (author) / JIA TIEKUN (author) / REN ERZHOU (author) / LU YANYANG (author) / SONG WEIZHI (author) / NIU YIXU (author)
2024-07-12
Patent
Electronic Resource
Chinese
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