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ITO waste target reproduced ITO powder, high-density target material and preparation method of high-density target material
The invention belongs to the technical field of ITO target material production, and discloses ITO waste target reproduced ITO powder, a high-density target material and a preparation method of the high-density target material. The method comprises the following steps: carrying out crushing treatment on the waste ITO target, carrying out heat preservation calcination at 600-700 DEG C, sieving, adding the obtained powder, a dispersing agent PVP and water into a dispersing tank, treating for 4-6 hours under shearing and stirring conditions and ultrasonic conditions, and uniformly dispersing to obtain slurry; uniformly mixing the obtained slurry with a binder PVA (Polyvinyl Alcohol) and a dispersant PEG (Polyethylene Glycol), and carrying out ball-milling treatment for 3-5 hours to obtain ball-milled slurry; and drying and screening the ball-milled slurry to obtain the reproduced ITO powder with the water content of 0.2-3% and the average particle size of 50-130 microns. The ITO powder is sintered after being subjected to isostatic pressing and cold isostatic pressing treatment, and the high-density ITO target material is obtained. In the preparation process of the ITO powder, the ball milling time is short, the dispersity is good, and the obtained ITO target material is high in purity and relative density.
本发明属于ITO靶材生产技术领域，公开了一种ITO废靶重制ITO粉、高密度靶材及其制备方法。将ITO废靶经破碎处理，600～700℃保温煅烧，过筛，将所得粉体与分散剂PVP和水加入到分散罐中，在剪切搅拌条件及超声条件下处理4～6h分散均匀，得到浆料；将所得浆料与粘结剂PVA和分散剂PEG混合均匀后球磨处理3～5h，得到球磨浆料；将球磨浆料通过干燥、筛分，得到水分为0.2～3％，平均粒径为50～130μm的重制ITO粉末。将ITO粉末经过等压和冷等静压处理后烧结，得到高密度ITO靶材。本发明ITO粉体制备过程中球磨时间短，分散性好，所得ITO靶材纯度和相对密度高。
ITO waste target reproduced ITO powder, high-density target material and preparation method of high-density target material
The invention belongs to the technical field of ITO target material production, and discloses ITO waste target reproduced ITO powder, a high-density target material and a preparation method of the high-density target material. The method comprises the following steps: carrying out crushing treatment on the waste ITO target, carrying out heat preservation calcination at 600-700 DEG C, sieving, adding the obtained powder, a dispersing agent PVP and water into a dispersing tank, treating for 4-6 hours under shearing and stirring conditions and ultrasonic conditions, and uniformly dispersing to obtain slurry; uniformly mixing the obtained slurry with a binder PVA (Polyvinyl Alcohol) and a dispersant PEG (Polyethylene Glycol), and carrying out ball-milling treatment for 3-5 hours to obtain ball-milled slurry; and drying and screening the ball-milled slurry to obtain the reproduced ITO powder with the water content of 0.2-3% and the average particle size of 50-130 microns. The ITO powder is sintered after being subjected to isostatic pressing and cold isostatic pressing treatment, and the high-density ITO target material is obtained. In the preparation process of the ITO powder, the ball milling time is short, the dispersity is good, and the obtained ITO target material is high in purity and relative density.
本发明属于ITO靶材生产技术领域，公开了一种ITO废靶重制ITO粉、高密度靶材及其制备方法。将ITO废靶经破碎处理，600～700℃保温煅烧，过筛，将所得粉体与分散剂PVP和水加入到分散罐中，在剪切搅拌条件及超声条件下处理4～6h分散均匀，得到浆料；将所得浆料与粘结剂PVA和分散剂PEG混合均匀后球磨处理3～5h，得到球磨浆料；将球磨浆料通过干燥、筛分，得到水分为0.2～3％，平均粒径为50～130μm的重制ITO粉末。将ITO粉末经过等压和冷等静压处理后烧结，得到高密度ITO靶材。本发明ITO粉体制备过程中球磨时间短，分散性好，所得ITO靶材纯度和相对密度高。
ITO waste target reproduced ITO powder, high-density target material and preparation method of high-density target material
一种ITO废靶重制ITO粉、高密度靶材及其制备方法
LUO YANG (author) / CHEN XI (author) / ZHONG XIAOHUA (author) / FU YONGBAO (author) / LEE JIN SEUNG (author) / YU FANG (author) / SHAO XUELIANG (author) / ZHU LIU (author)
2023-03-31
Patent
Electronic Resource
Chinese
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