A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Stacking and sintering method based on PZT-5 type ceramic wafer
The invention relates to a stacking and sintering method based on a PZT-5 type ceramic wafer. The stacking and sintering method comprises the following steps: preparing materials; mixing the materials; pre-sintering; refining the powder; plasticizing; molding and removing plastic; preparing sintering padding, meanwhile enabling the particles of a ceramic green body and zirconium dioxide powder to be mixed and ground; sintering the ceramic; carrying out electrode loading and polarization treatment; and measuring the piezoelectric property. According to the invention, the zirconium dioxide powder is introduced on the basis of the PZT-5 type piezoelectric ceramic process. The novel sintering padding is prepared by ball-milling and mixing PZT-5 type piezoelectric ceramic clinker powder through a planetary ball mill, and the novel sintering padding is spread on the surface of the green wafer so that volatilization of PbO in the wafer is reduced, the electrical property of the ceramic is improved, and the phenomenon of wafer adhesion is improved.
本发明涉及一种基于PZT‑5型陶瓷晶片堆叠烧结方法，包括如下步骤：配料；混料；预烧；粉料细化；增塑；成型与排塑；制备烧结垫料，同时陶瓷生坯的颗粒与二氧化锆粉体混合研磨；陶瓷烧结；上电极和极化处理；压电性能测量。本发明申请在PZT‑5型压电陶瓷工艺的基础上，引入二氧化锆粉体。通过行星式球磨机与PZT‑5型压电陶瓷熟料粉球磨混合，制备成一种新型烧结垫料，铺洒于生坯晶片表面有助于降低晶片中PbO的挥发，提高陶瓷的电性能，改善晶片粘连的现象。
Stacking and sintering method based on PZT-5 type ceramic wafer
The invention relates to a stacking and sintering method based on a PZT-5 type ceramic wafer. The stacking and sintering method comprises the following steps: preparing materials; mixing the materials; pre-sintering; refining the powder; plasticizing; molding and removing plastic; preparing sintering padding, meanwhile enabling the particles of a ceramic green body and zirconium dioxide powder to be mixed and ground; sintering the ceramic; carrying out electrode loading and polarization treatment; and measuring the piezoelectric property. According to the invention, the zirconium dioxide powder is introduced on the basis of the PZT-5 type piezoelectric ceramic process. The novel sintering padding is prepared by ball-milling and mixing PZT-5 type piezoelectric ceramic clinker powder through a planetary ball mill, and the novel sintering padding is spread on the surface of the green wafer so that volatilization of PbO in the wafer is reduced, the electrical property of the ceramic is improved, and the phenomenon of wafer adhesion is improved.
本发明涉及一种基于PZT‑5型陶瓷晶片堆叠烧结方法，包括如下步骤：配料；混料；预烧；粉料细化；增塑；成型与排塑；制备烧结垫料，同时陶瓷生坯的颗粒与二氧化锆粉体混合研磨；陶瓷烧结；上电极和极化处理；压电性能测量。本发明申请在PZT‑5型压电陶瓷工艺的基础上，引入二氧化锆粉体。通过行星式球磨机与PZT‑5型压电陶瓷熟料粉球磨混合，制备成一种新型烧结垫料，铺洒于生坯晶片表面有助于降低晶片中PbO的挥发，提高陶瓷的电性能，改善晶片粘连的现象。
Stacking and sintering method based on PZT-5 type ceramic wafer
一种基于PZT-5型陶瓷晶片堆叠烧结方法
YU JIAN (author) / TANG YANMIN (author) / LI WENHAO (author) / ZHANG ZHENGYE (author)
2022-01-04
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
Through-wafer Via Etching Enabling Wafer Stacking
| British Library Online Contents | 2005
Method for improving sintering relative density of lithium lanthanum zirconium oxide ceramic wafer
| European Patent Office | 2022
PLASMA-ASSISTED CERAMIC SINTERING DEVICE AND CERAMIC SINTERING METHOD
| European Patent Office | 2025
PLASMA-ASSISTED CERAMIC SINTERING DEVICE AND CERAMIC SINTERING METHOD
| European Patent Office | 2023