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Heat treatment method for improving polarization intensity of bismuth ferrite-barium titanate ferroelectric ceramic
The invention discloses a heat treatment method for improving the polarization intensity of bismuth ferrite-barium titanate ferroelectric ceramic. The method comprises the following steps: putting the bismuth ferrite-barium titanate ferroelectric ceramic on a monocrystalline silicon wafer, then putting the monocrystalline silicon wafer into an annealing furnace, and carrying out heat treatment in an oxygen atmosphere, wherein the heat treatment process comprises the step of conducting introduction of oxygen for 5 minutes or more, then performing heating to 800-1000 DEG C at a heating rate of more than or equal to 20 DEG C/s, preserving heat for 30-180 seconds, conducting cooling to 200 DEG C or below within 300 seconds, and taking out the monocrystalline silicon wafer to obtain the bismuth ferrite-barium titanate ferroelectric ceramic having been subjected to heat treatment. According to the heat treatment method disclosed by the invention, the bismuth ferrite-barium titanate-based solid solution ceramic placed on a monocrystalline silicon substrate is heated to a certain temperature within a short time, is subjected to heat preservation for a certain time and then is rapidly cooled, so the polarization intensity of the ceramic is improved. Meanwhile, atomic diffusion is accelerated at a high temperature, monocrystalline silicon atoms and bismuth ferrite-barium titanate are mutually diffused, and tetragonality in bismuth ferrite-barium titanate unit cells is further improved by utilizing a huge difference between monocrystalline silicon and bismuth ferrite-barium titanate unit cell parameters, so the polarization intensity of the bismuth ferrite-barium titanate-based solid solution ceramic is greatly improved.
本发明公开了一种用于提高铁酸铋‑钛酸钡铁电陶瓷极化强度的热处理方法，包括如下步骤，将铁酸铋‑钛酸钡铁电陶瓷置于单晶硅片上，然后放入退火炉中于氧气气氛下进行热处理，热处理过程中，先通入氧气5min以上，然后以≧20℃/s的升温速率升温至800～1000℃，保温30～180s，并于300s内降温至200℃以下，取出，获得热处理后的铁酸铋‑钛酸钡铁电陶瓷；本发明的热处理方法利用短时间内将置于单晶硅衬底上的铁酸铋‑钛酸钡基固溶体陶瓷升温到一定温度并保温一定时间后迅速降温，使陶瓷的极化强度提高。同时高温下原子扩散加快，单晶硅原子与铁酸铋‑钛酸钡相互扩散，利用单晶硅与铁酸铋‑钛酸钡晶胞参数的巨大差异，进一步增大了铁酸铋‑钛酸钡晶胞中的四方性，从而使铁酸铋‑钛酸钡基固溶体陶瓷的极化强度大幅的提升。
Heat treatment method for improving polarization intensity of bismuth ferrite-barium titanate ferroelectric ceramic
The invention discloses a heat treatment method for improving the polarization intensity of bismuth ferrite-barium titanate ferroelectric ceramic. The method comprises the following steps: putting the bismuth ferrite-barium titanate ferroelectric ceramic on a monocrystalline silicon wafer, then putting the monocrystalline silicon wafer into an annealing furnace, and carrying out heat treatment in an oxygen atmosphere, wherein the heat treatment process comprises the step of conducting introduction of oxygen for 5 minutes or more, then performing heating to 800-1000 DEG C at a heating rate of more than or equal to 20 DEG C/s, preserving heat for 30-180 seconds, conducting cooling to 200 DEG C or below within 300 seconds, and taking out the monocrystalline silicon wafer to obtain the bismuth ferrite-barium titanate ferroelectric ceramic having been subjected to heat treatment. According to the heat treatment method disclosed by the invention, the bismuth ferrite-barium titanate-based solid solution ceramic placed on a monocrystalline silicon substrate is heated to a certain temperature within a short time, is subjected to heat preservation for a certain time and then is rapidly cooled, so the polarization intensity of the ceramic is improved. Meanwhile, atomic diffusion is accelerated at a high temperature, monocrystalline silicon atoms and bismuth ferrite-barium titanate are mutually diffused, and tetragonality in bismuth ferrite-barium titanate unit cells is further improved by utilizing a huge difference between monocrystalline silicon and bismuth ferrite-barium titanate unit cell parameters, so the polarization intensity of the bismuth ferrite-barium titanate-based solid solution ceramic is greatly improved.
本发明公开了一种用于提高铁酸铋‑钛酸钡铁电陶瓷极化强度的热处理方法，包括如下步骤，将铁酸铋‑钛酸钡铁电陶瓷置于单晶硅片上，然后放入退火炉中于氧气气氛下进行热处理，热处理过程中，先通入氧气5min以上，然后以≧20℃/s的升温速率升温至800～1000℃，保温30～180s，并于300s内降温至200℃以下，取出，获得热处理后的铁酸铋‑钛酸钡铁电陶瓷；本发明的热处理方法利用短时间内将置于单晶硅衬底上的铁酸铋‑钛酸钡基固溶体陶瓷升温到一定温度并保温一定时间后迅速降温，使陶瓷的极化强度提高。同时高温下原子扩散加快，单晶硅原子与铁酸铋‑钛酸钡相互扩散，利用单晶硅与铁酸铋‑钛酸钡晶胞参数的巨大差异，进一步增大了铁酸铋‑钛酸钡晶胞中的四方性，从而使铁酸铋‑钛酸钡基固溶体陶瓷的极化强度大幅的提升。
Heat treatment method for improving polarization intensity of bismuth ferrite-barium titanate ferroelectric ceramic
一种用于提高铁酸铋-钛酸钡铁电陶瓷极化强度的热处理方法
ZHANG DOU (author) / TANG LIN (author) / YAN ZHONGNA (author) / ZHOU XUEFAN (author)
2022-01-11
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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