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The invention discloses a full aluminum nitride ceramic heating structure device and a preparation method thereof. Comprising an aluminum nitride conductor and aluminum nitride insulating ceramic wrapping the aluminum nitride conductor. The aluminum nitride insulation ceramic forms insulation protection on the aluminum nitride conductor, the aluminum nitride conductor is subjected to graphical design, and the aluminum nitride conductor and the aluminum nitride insulation ceramic are co-fired into a whole and are tightly and mutually fused, hot pressed and sintered into a whole. The heating structure has the excellent characteristics of low heat capacity, low energy consumption, high heat radiation coefficient, high electric heating efficiency, small thermal expansion coefficient, no deformation at high temperature, light weight, large power, energy conservation, no pollution, safety, reliability and the like, and can meet the technical requirements on heating structure devices in modern semiconductor manufacturing scientific and technological innovation.
本发明公开了一种全氮化铝陶瓷加热结构器件及其制备方法。包括氮化铝导体以及将氮化铝导体包覆在内的氮化铝绝缘陶瓷。氮化铝绝缘陶瓷形成对氮化铝导体绝缘保护，氮化铝导体进行图形化设计，与氮化铝绝缘陶瓷共烧一体，紧密相互共融热压烧结为一体。其具有低热容、能耗低而热辐射系数高、导致电热效率高、热膨胀系数小、高温不变形、重量轻、功率大、节能、无污染、安全可靠等优异特点，能够满足现代半导体制造科技创新中对加热结构器件的技术需求。
The invention discloses a full aluminum nitride ceramic heating structure device and a preparation method thereof. Comprising an aluminum nitride conductor and aluminum nitride insulating ceramic wrapping the aluminum nitride conductor. The aluminum nitride insulation ceramic forms insulation protection on the aluminum nitride conductor, the aluminum nitride conductor is subjected to graphical design, and the aluminum nitride conductor and the aluminum nitride insulation ceramic are co-fired into a whole and are tightly and mutually fused, hot pressed and sintered into a whole. The heating structure has the excellent characteristics of low heat capacity, low energy consumption, high heat radiation coefficient, high electric heating efficiency, small thermal expansion coefficient, no deformation at high temperature, light weight, large power, energy conservation, no pollution, safety, reliability and the like, and can meet the technical requirements on heating structure devices in modern semiconductor manufacturing scientific and technological innovation.
本发明公开了一种全氮化铝陶瓷加热结构器件及其制备方法。包括氮化铝导体以及将氮化铝导体包覆在内的氮化铝绝缘陶瓷。氮化铝绝缘陶瓷形成对氮化铝导体绝缘保护，氮化铝导体进行图形化设计，与氮化铝绝缘陶瓷共烧一体，紧密相互共融热压烧结为一体。其具有低热容、能耗低而热辐射系数高、导致电热效率高、热膨胀系数小、高温不变形、重量轻、功率大、节能、无污染、安全可靠等优异特点，能够满足现代半导体制造科技创新中对加热结构器件的技术需求。
Full aluminum nitride ceramic heating structure device and preparation method thereof
一种全氮化铝陶瓷加热结构器件及其制备方法
2022-12-30
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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