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Electronic ceramic slurry and preparation method thereof
The invention discloses electronic ceramic slurry and a preparation method thereof, relates to the field of semiconductor slurry processing, and aims to solve the problem of poor quality easily caused by slurry tape casting. The electronic ceramic slurry is characterized by comprising silicon nitride powder, a mixed solvent, a dispersing agent, a binder, a plasticizer and a sintering aid; based on the mass of the silicon nitride powder, the mass ratio is as follows: 50-100% of a mixed solvent, 5-30% of a binder, 15-70% of a plasticizer, 0.5-3.5% of a dispersant and 1-15% of a sintering aid; wherein the binder is a PMMA (Polymethyl Methacrylate)/PVB (Polyvinyl Butyral) binary system binder; the ratio of PMMA to PVB in the binder is (1: 1)-(1: 5); and the molecular weight of the binder PVB is 40000 to 200000 g/mol. According to the electronic ceramic slurry and the preparation method thereof disclosed by the invention, a ceramic green body cast by the slurry is smooth in surface, free of obvious defects and good in product quality.
本发明公开了一种电子陶瓷浆料及其制备方法，涉及半导体浆料加工领域，旨在解决浆料流延出来容易出现质量差的问题，其技术方案要点是：一种电子陶瓷浆料，包括：氮化硅粉体、混合溶剂、分散剂、粘结剂、塑化剂、烧结助剂；基于氮化硅粉体质量计质量比为：混合溶剂50‑100％，粘结剂5‑30％，塑化剂15‑70％，分散剂0.5‑3.5％，烧结助剂1‑15％；其中，所述粘结剂为PMMA/PVB两元体系粘结剂；所述粘结剂PMMA/PVB配比为1：1‑1：5；所述粘结剂PVB分子量为40000‑200000g/mol。本发明的一种电子陶瓷浆料及其制备方法流延出的陶瓷生坯表面光滑无明显缺陷，产品质量好。
Electronic ceramic slurry and preparation method thereof
The invention discloses electronic ceramic slurry and a preparation method thereof, relates to the field of semiconductor slurry processing, and aims to solve the problem of poor quality easily caused by slurry tape casting. The electronic ceramic slurry is characterized by comprising silicon nitride powder, a mixed solvent, a dispersing agent, a binder, a plasticizer and a sintering aid; based on the mass of the silicon nitride powder, the mass ratio is as follows: 50-100% of a mixed solvent, 5-30% of a binder, 15-70% of a plasticizer, 0.5-3.5% of a dispersant and 1-15% of a sintering aid; wherein the binder is a PMMA (Polymethyl Methacrylate)/PVB (Polyvinyl Butyral) binary system binder; the ratio of PMMA to PVB in the binder is (1: 1)-(1: 5); and the molecular weight of the binder PVB is 40000 to 200000 g/mol. According to the electronic ceramic slurry and the preparation method thereof disclosed by the invention, a ceramic green body cast by the slurry is smooth in surface, free of obvious defects and good in product quality.
本发明公开了一种电子陶瓷浆料及其制备方法，涉及半导体浆料加工领域，旨在解决浆料流延出来容易出现质量差的问题，其技术方案要点是：一种电子陶瓷浆料，包括：氮化硅粉体、混合溶剂、分散剂、粘结剂、塑化剂、烧结助剂；基于氮化硅粉体质量计质量比为：混合溶剂50‑100％，粘结剂5‑30％，塑化剂15‑70％，分散剂0.5‑3.5％，烧结助剂1‑15％；其中，所述粘结剂为PMMA/PVB两元体系粘结剂；所述粘结剂PMMA/PVB配比为1：1‑1：5；所述粘结剂PVB分子量为40000‑200000g/mol。本发明的一种电子陶瓷浆料及其制备方法流延出的陶瓷生坯表面光滑无明显缺陷，产品质量好。
Electronic ceramic slurry and preparation method thereof
一种电子陶瓷浆料及其制备方法
DING YINGYING (author) / HE XIANHAN (author) / GE ZHUANG (author) / WANG BIN (author) / HE JINGYU (author)
2023-01-31
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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