A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
The vertical heat treatment equipment comprises a process chamber and a process door, the process chamber is provided with a process space and an opening communicated with the process space, and the process door is in sealing fit with the process chamber at the opening; the process door comprises a base, a bearing platform, a separation disc and a driving device, and the base is used for bearing the process chamber; the separation disc is mounted on the base, the circumferential edge of the separation disc is in sealing fit with the process chamber, and the separation disc separates the base from the process space; the bearing platform is arranged in the process space and used for bearing a wafer boat, the separation disc is provided with a through rotation hole, the driving device is installed on the base, and the driving device is connected with the bearing platform through the rotation hole so as to drive the bearing platform to rotate; the bearing platform is in hermetic seal fit with the separation disc at the rotation hole; and the separation disc and the bearing platform are quartz structural members. According to the scheme, the problem that the process door of the vertical heat treatment equipment in the related technology is easily damaged can be solved.
本申请公开一种立式热处理设备，其包括工艺腔室和工艺门，其中：工艺腔室具有工艺空间和与工艺空间连通的开口，工艺门在开口与工艺腔室密封配合；工艺门包括基座、承台、分隔盘和驱动装置，基座用于承载工艺腔室；分隔盘安装于基座上，且分隔盘的周向边缘与工艺腔室密封配合，分隔盘将基座与工艺空间分隔开；承台设置于工艺空间内而用于承载晶舟，分隔盘开设有贯通的回转孔，驱动装置安装于基座，且驱动装置通过回转孔与承台连接，以驱动承台转动；承台在回转孔处与分隔盘气密封配合；分隔盘和承台均为石英结构件。上述方案能够解决相关技术中立式热处理设备的工艺门易受损的问题。
The vertical heat treatment equipment comprises a process chamber and a process door, the process chamber is provided with a process space and an opening communicated with the process space, and the process door is in sealing fit with the process chamber at the opening; the process door comprises a base, a bearing platform, a separation disc and a driving device, and the base is used for bearing the process chamber; the separation disc is mounted on the base, the circumferential edge of the separation disc is in sealing fit with the process chamber, and the separation disc separates the base from the process space; the bearing platform is arranged in the process space and used for bearing a wafer boat, the separation disc is provided with a through rotation hole, the driving device is installed on the base, and the driving device is connected with the bearing platform through the rotation hole so as to drive the bearing platform to rotate; the bearing platform is in hermetic seal fit with the separation disc at the rotation hole; and the separation disc and the bearing platform are quartz structural members. According to the scheme, the problem that the process door of the vertical heat treatment equipment in the related technology is easily damaged can be solved.
本申请公开一种立式热处理设备，其包括工艺腔室和工艺门，其中：工艺腔室具有工艺空间和与工艺空间连通的开口，工艺门在开口与工艺腔室密封配合；工艺门包括基座、承台、分隔盘和驱动装置，基座用于承载工艺腔室；分隔盘安装于基座上，且分隔盘的周向边缘与工艺腔室密封配合，分隔盘将基座与工艺空间分隔开；承台设置于工艺空间内而用于承载晶舟，分隔盘开设有贯通的回转孔，驱动装置安装于基座，且驱动装置通过回转孔与承台连接，以驱动承台转动；承台在回转孔处与分隔盘气密封配合；分隔盘和承台均为石英结构件。上述方案能够解决相关技术中立式热处理设备的工艺门易受损的问题。
Vertical heat treatment equipment
立式热处理设备
GAO SHANG (author)
2023-02-03
Patent
Electronic Resource
Chinese
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
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