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Preparation method of low-resistivity high-mobility oxide target material
The invention relates to the technical field of target materials, and discloses a low-resistivity and high-mobility oxide target material and a preparation method thereof, and the method is as follows: a target material blank is subjected to heating sintering under an oxygen atmosphere condition and heating sintering under an oxygen-free atmosphere condition in sequence to obtain the low-resistivity and high-mobility oxide target material, the metal oxide in the target material green body consists of praseodymium oxide, indium oxide, gallium oxide and zinc oxide. The invention provides a preparation method of a low-resistivity and high-mobility oxide target material, which comprises the following steps of: heating and sintering a target material blank in a way of sintering in an oxygen atmosphere and sintering in an anaerobic atmosphere in sequence, and combining aerobic sintering and anaerobic sintering to generate a synergistic effect, so as to obtain the low-resistivity and high-mobility oxide target material. The dispersing agent and the binding agent in the oxide target material are completely discharged, so that the oxide target material has extremely high density and high carrier mobility, meanwhile, the oxide target material generates oxygen vacancies, and the electrical resistivity of the oxide target material is reduced so as to obtain excellent electrical conductivity.
本发明涉及靶材技术领域，公开了一种低电阻率高迁移率氧化物靶材及其制备方法，所述方法为：将靶材坯体依次经过氧气气氛条件下升温烧结和无氧气氛条件下升温烧结即得；所述靶材坯体中的金属氧化物由氧化镨、氧化铟、氧化镓、氧化锌组成。本发明提供了一种低电阻率高迁移率氧化物靶材的制备方法，采用依次经过氧气气氛条件下烧结、无氧气氛条件下烧结的方式来升温烧结处理靶材坯体，有氧烧结和无氧烧结结合产生协同作用，将氧化物靶材中的分散剂和粘结剂全部排出使得氧化物靶材有极高的致密度从而具有高载流子迁移率的同时，还使得氧化物靶材产生了氧空位，降低了氧化物靶材的电阻率以获得优良的导电性。
Preparation method of low-resistivity high-mobility oxide target material
The invention relates to the technical field of target materials, and discloses a low-resistivity and high-mobility oxide target material and a preparation method thereof, and the method is as follows: a target material blank is subjected to heating sintering under an oxygen atmosphere condition and heating sintering under an oxygen-free atmosphere condition in sequence to obtain the low-resistivity and high-mobility oxide target material, the metal oxide in the target material green body consists of praseodymium oxide, indium oxide, gallium oxide and zinc oxide. The invention provides a preparation method of a low-resistivity and high-mobility oxide target material, which comprises the following steps of: heating and sintering a target material blank in a way of sintering in an oxygen atmosphere and sintering in an anaerobic atmosphere in sequence, and combining aerobic sintering and anaerobic sintering to generate a synergistic effect, so as to obtain the low-resistivity and high-mobility oxide target material. The dispersing agent and the binding agent in the oxide target material are completely discharged, so that the oxide target material has extremely high density and high carrier mobility, meanwhile, the oxide target material generates oxygen vacancies, and the electrical resistivity of the oxide target material is reduced so as to obtain excellent electrical conductivity.
本发明涉及靶材技术领域，公开了一种低电阻率高迁移率氧化物靶材及其制备方法，所述方法为：将靶材坯体依次经过氧气气氛条件下升温烧结和无氧气氛条件下升温烧结即得；所述靶材坯体中的金属氧化物由氧化镨、氧化铟、氧化镓、氧化锌组成。本发明提供了一种低电阻率高迁移率氧化物靶材的制备方法，采用依次经过氧气气氛条件下烧结、无氧气氛条件下烧结的方式来升温烧结处理靶材坯体，有氧烧结和无氧烧结结合产生协同作用，将氧化物靶材中的分散剂和粘结剂全部排出使得氧化物靶材有极高的致密度从而具有高载流子迁移率的同时，还使得氧化物靶材产生了氧空位，降低了氧化物靶材的电阻率以获得优良的导电性。
Preparation method of low-resistivity high-mobility oxide target material
一种低电阻率高迁移率氧化物靶材的制备方法
LI KAIJIE (author) / SHAO XUELIANG (author) / LI QINGQING (author) / WANG QIFENG (author) / ZHONG XIAOHUA (author)
2023-04-18
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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