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Black sand full-melting efficient crucible for polycrystalline ingot casting and preparation method
The invention discloses a black sand full-melting efficient crucible for polycrystalline ingot casting and a preparation method, the black sand full-melting efficient crucible comprises a fused quartz crucible, the bottom surface of the inner cavity of the fused quartz crucible is coated with a composite coating, silicon granules are uniformly scattered above the composite coating, and the periphery of the inner cavity wall of the crucible is uniformly coated with a side surface high-purity layer. The black sand full-melting crucible for ingot casting is obtained by increasing the size of the seed crystal and manufacturing the matched composite coating, crystals prepared by using the crucible are uniform in nucleation, free of pot sticking and low in dislocation, nucleation uniformity is improved, crystal dislocation is effectively reduced, the stability of silicon wafer efficiency is guaranteed, meanwhile, the oxygen content is low, and a spraying process does not need to be adjusted.
本发明公开了一种多晶铸锭用黑砂全熔高效坩埚及制备方法,该黑砂全熔高效坩埚包括熔融石英坩埚,熔融石英坩埚内腔底面涂有复合涂层,且复合涂层的上方均匀洒落有硅粒料,所述坩埚内腔壁四周均涂有侧面高纯层。本申请通过提高籽晶尺寸和制作匹配的复合涂层得到了铸锭用黑砂全熔坩埚,使用该坩埚制备的晶体,形核均匀,无粘锅,低位错,提高了形核均匀性,有效降低晶体位错,保证了硅片效率的稳定性,同时具有较低的氧含量,无需调整喷涂工艺。
Black sand full-melting efficient crucible for polycrystalline ingot casting and preparation method
The invention discloses a black sand full-melting efficient crucible for polycrystalline ingot casting and a preparation method, the black sand full-melting efficient crucible comprises a fused quartz crucible, the bottom surface of the inner cavity of the fused quartz crucible is coated with a composite coating, silicon granules are uniformly scattered above the composite coating, and the periphery of the inner cavity wall of the crucible is uniformly coated with a side surface high-purity layer. The black sand full-melting crucible for ingot casting is obtained by increasing the size of the seed crystal and manufacturing the matched composite coating, crystals prepared by using the crucible are uniform in nucleation, free of pot sticking and low in dislocation, nucleation uniformity is improved, crystal dislocation is effectively reduced, the stability of silicon wafer efficiency is guaranteed, meanwhile, the oxygen content is low, and a spraying process does not need to be adjusted.
本发明公开了一种多晶铸锭用黑砂全熔高效坩埚及制备方法,该黑砂全熔高效坩埚包括熔融石英坩埚,熔融石英坩埚内腔底面涂有复合涂层,且复合涂层的上方均匀洒落有硅粒料,所述坩埚内腔壁四周均涂有侧面高纯层。本申请通过提高籽晶尺寸和制作匹配的复合涂层得到了铸锭用黑砂全熔坩埚,使用该坩埚制备的晶体,形核均匀,无粘锅,低位错,提高了形核均匀性,有效降低晶体位错,保证了硅片效率的稳定性,同时具有较低的氧含量,无需调整喷涂工艺。
Black sand full-melting efficient crucible for polycrystalline ingot casting and preparation method
一种多晶铸锭用黑砂全熔高效坩埚及制备方法
WANG HAIGUO (author) / SU CHENG (author) / PEI YING (author) / DENG LIANGLIANG (author)
2023-08-01
Patent
Electronic Resource
Chinese
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