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PMNT target material and preparation method thereof
The invention provides a preparation method of a PMNT target material. The preparation method comprises the following steps: obtaining an MNT precursor; the MNT precursor and PbO are mixed and subjected to high-temperature treatment, and PMNT powder is obtained; and the PMNT powder is subjected to ball milling, granulation, sieving, cold isostatic pressing forming, rubber discharging and hot pressing sintering treatment, and the PMNT target material is obtained. According to the preparation method provided by the invention, the PMNT target material with a uniform microstructure, high density and high purity can be obtained, and particularly, the large-size and high-quality PMNT target material can be obtained, so that the yield of a PMNT film product is improved, and the cost is reduced.
本申请提供了一种PMNT靶材的制备方法,包括:获得MNT前驱体;将MNT前驱体与PbO混合并进行高温处理,获得PMNT粉体;将PMNT粉体进行球磨、造粒、过筛、冷等静压成型、排胶、热压烧结处理,获得PMNT靶材。本申请提供的制备方法可以得到微观结构均匀、致密度高、纯度高的PMNT靶材,特别是可以获得大尺寸高质量的PMNT靶材,从而提高PMNT薄膜产品的成品率,降低成本。
PMNT target material and preparation method thereof
The invention provides a preparation method of a PMNT target material. The preparation method comprises the following steps: obtaining an MNT precursor; the MNT precursor and PbO are mixed and subjected to high-temperature treatment, and PMNT powder is obtained; and the PMNT powder is subjected to ball milling, granulation, sieving, cold isostatic pressing forming, rubber discharging and hot pressing sintering treatment, and the PMNT target material is obtained. According to the preparation method provided by the invention, the PMNT target material with a uniform microstructure, high density and high purity can be obtained, and particularly, the large-size and high-quality PMNT target material can be obtained, so that the yield of a PMNT film product is improved, and the cost is reduced.
本申请提供了一种PMNT靶材的制备方法,包括:获得MNT前驱体;将MNT前驱体与PbO混合并进行高温处理,获得PMNT粉体;将PMNT粉体进行球磨、造粒、过筛、冷等静压成型、排胶、热压烧结处理,获得PMNT靶材。本申请提供的制备方法可以得到微观结构均匀、致密度高、纯度高的PMNT靶材,特别是可以获得大尺寸高质量的PMNT靶材,从而提高PMNT薄膜产品的成品率,降低成本。
PMNT target material and preparation method thereof
一种PMNT靶材及其制备方法
TONG YAQI (author) / ZHENG YU (author) / LI HUI (author) / LIU XIAOHUA (author) / WANG ZHEN (author)
2023-08-08
Patent
Electronic Resource
Chinese
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