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Manufacturing process of high-performance nano-material ceramic thin-film device
The invention discloses a manufacturing process of a high-performance nano-material ceramic thin-film device, and belongs to the technical field of nano-ceramic materials, and the manufacturing process comprises the following steps: S1, preparing a nano-material: preparing an aluminum oxide solution through a reaction of aluminum oxide and a solution; s2, preparing a ceramic thin film: fusing the aluminum oxide solution and a target material to prepare the ceramic thin film; s3, sintering treatment: sintering the ceramic thin film; and S4, treating and processing: carrying out surface treatment on the sintered ceramic film, testing, and finally preparing a specified article. In one or more embodiments of the invention, alumina particles with a particle size of 10-60 nm are selected, and the alumina particles with a high specific surface area and a small particle size are adopted to prepare the substrate, so the compactness and uniformity of the substrate can be improved, the quality and performance of the ceramic film are improved, and meanwhile, the ceramic film has a good application prospect. The mixing of alumina and ethanol can ensure the purity and stability of the base and avoid the interference of impurities on the preparation process.
本发明公开了高性能纳米材料陶瓷薄膜器件的制造工艺，属于纳米陶瓷材料技术领域，包括以下步骤：S1、制备纳米材料：通过氧化铝与溶液反应制作氧化铝溶液；S2、制备陶瓷薄膜：将氧化铝溶液和靶材融合制备陶瓷薄膜；S3、烧结处理：将陶瓷薄膜进行烧结处理；S4、处理加工：将烧结后的陶瓷薄膜进行表面处理并进行测试，最后制成指定物品。在本发明一个或多个实施例中，选用粒径在10‑60nm的氧化铝颗粒，本发明中，通过采用颗粒具有较高的比表面积和较小的颗粒尺寸的氧化铝颗粒制作基底，可以提高基地的致密性和均匀性，从而提高陶瓷薄膜的质量和性能，同时，氧化铝与乙醇混合可以保证基地的纯度和稳定性，避免杂质对制备过程的干扰。
Manufacturing process of high-performance nano-material ceramic thin-film device
The invention discloses a manufacturing process of a high-performance nano-material ceramic thin-film device, and belongs to the technical field of nano-ceramic materials, and the manufacturing process comprises the following steps: S1, preparing a nano-material: preparing an aluminum oxide solution through a reaction of aluminum oxide and a solution; s2, preparing a ceramic thin film: fusing the aluminum oxide solution and a target material to prepare the ceramic thin film; s3, sintering treatment: sintering the ceramic thin film; and S4, treating and processing: carrying out surface treatment on the sintered ceramic film, testing, and finally preparing a specified article. In one or more embodiments of the invention, alumina particles with a particle size of 10-60 nm are selected, and the alumina particles with a high specific surface area and a small particle size are adopted to prepare the substrate, so the compactness and uniformity of the substrate can be improved, the quality and performance of the ceramic film are improved, and meanwhile, the ceramic film has a good application prospect. The mixing of alumina and ethanol can ensure the purity and stability of the base and avoid the interference of impurities on the preparation process.
本发明公开了高性能纳米材料陶瓷薄膜器件的制造工艺，属于纳米陶瓷材料技术领域，包括以下步骤：S1、制备纳米材料：通过氧化铝与溶液反应制作氧化铝溶液；S2、制备陶瓷薄膜：将氧化铝溶液和靶材融合制备陶瓷薄膜；S3、烧结处理：将陶瓷薄膜进行烧结处理；S4、处理加工：将烧结后的陶瓷薄膜进行表面处理并进行测试，最后制成指定物品。在本发明一个或多个实施例中，选用粒径在10‑60nm的氧化铝颗粒，本发明中，通过采用颗粒具有较高的比表面积和较小的颗粒尺寸的氧化铝颗粒制作基底，可以提高基地的致密性和均匀性，从而提高陶瓷薄膜的质量和性能，同时，氧化铝与乙醇混合可以保证基地的纯度和稳定性，避免杂质对制备过程的干扰。
Manufacturing process of high-performance nano-material ceramic thin-film device
高性能纳米材料陶瓷薄膜器件的制造工艺
ZHAO GUORONG (author) / LI YONGKUN (author) / ZHENG FUZHAO (author) / LI FEI (author) / YANG ZHENMIN (author)
2023-08-22
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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