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Graphite component for epitaxial growth of silicon carbide and preparation process of composite coating of graphite component
The invention relates to the technical field of epitaxial growth of silicon carbide, in particular to a graphite component for epitaxial growth of silicon carbide and a preparation process of a composite coating of the graphite component, which comprises the following steps: firstly, preheating the graphite component in a high-purity nitrogen environment according to a mass ratio of 5-10%; secondly, the graphite part subjected to preheating treatment is coated with a coating raw material, and the coating raw material comprises, by mass, 30%-40% of carbon nanotubes, 20%-30% of graphene, 10%-20% of nano silicon carbide and 20%-30% of a macromolecular binding agent; and finally, the coated graphite part is subjected to heat treatment in a nitrogen environment, and the composite coating is obtained. According to the method, efficient combination of the graphite part and the composite coating can be achieved, the service life of the graphite part is prolonged, operation is easy, efficiency is high, and industrial production is easy to achieve.
本发明涉及碳化硅的外延生长技术领域，具体涉及一种碳化硅外延生长用石墨部件及其复合涂层制备工艺，包括以下步骤：首先，将石墨部件按照质量比例5％‑10％在高纯度氮气环境中进行预热处理；其次，将经过预热处理的石墨部件涂覆以涂层原料，涂层原料包括质量比例30％‑40％的碳纳米管、20％‑30％的石墨烯、10％‑20％的纳米碳化硅以及20％‑30％的高分子结合剂；最后，将涂覆后的石墨部件在氮气环境中进行热处理，得到复合涂层。本发明，能够实现石墨部件与复合涂层的高效结合，延长了石墨部件的使用寿命，操作简单，效率高，易于实现工业化生产。
Graphite component for epitaxial growth of silicon carbide and preparation process of composite coating of graphite component
The invention relates to the technical field of epitaxial growth of silicon carbide, in particular to a graphite component for epitaxial growth of silicon carbide and a preparation process of a composite coating of the graphite component, which comprises the following steps: firstly, preheating the graphite component in a high-purity nitrogen environment according to a mass ratio of 5-10%; secondly, the graphite part subjected to preheating treatment is coated with a coating raw material, and the coating raw material comprises, by mass, 30%-40% of carbon nanotubes, 20%-30% of graphene, 10%-20% of nano silicon carbide and 20%-30% of a macromolecular binding agent; and finally, the coated graphite part is subjected to heat treatment in a nitrogen environment, and the composite coating is obtained. According to the method, efficient combination of the graphite part and the composite coating can be achieved, the service life of the graphite part is prolonged, operation is easy, efficiency is high, and industrial production is easy to achieve.
本发明涉及碳化硅的外延生长技术领域，具体涉及一种碳化硅外延生长用石墨部件及其复合涂层制备工艺，包括以下步骤：首先，将石墨部件按照质量比例5％‑10％在高纯度氮气环境中进行预热处理；其次，将经过预热处理的石墨部件涂覆以涂层原料，涂层原料包括质量比例30％‑40％的碳纳米管、20％‑30％的石墨烯、10％‑20％的纳米碳化硅以及20％‑30％的高分子结合剂；最后，将涂覆后的石墨部件在氮气环境中进行热处理，得到复合涂层。本发明，能够实现石墨部件与复合涂层的高效结合，延长了石墨部件的使用寿命，操作简单，效率高，易于实现工业化生产。
Graphite component for epitaxial growth of silicon carbide and preparation process of composite coating of graphite component
一种碳化硅外延生长用石墨部件及其复合涂层制备工艺
JIANG YOULIN (author) / MA LIANGLAI (author)
2023-09-12
Patent
Electronic Resource
Chinese
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