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A platform for research: civil engineering, architecture and urbanism
High-resistance and high-corrosion-resistance ceramic material and wafer carrying table
The invention relates to a high-resistance and high-corrosion-resistance ceramic material and a wafer carrying table. The present invention addresses the problem of having sufficient corrosion resistance at high temperatures and increasing the volume resistivity at high temperatures. The high-resistance and high-corrosion-resistance ceramic material contains magnesium-aluminum nitrogen oxide, and the carbon content is 0.005-0.275% by mass.
本发明涉及高电阻高耐腐蚀陶瓷材料及晶片载放台。所要解决的课题是，在高温下具有充分的耐腐蚀性、并且提高高温下的体积电阻率。本发明的高电阻高耐腐蚀陶瓷材料含有镁‑铝氮氧化物，碳含有率为0.005～0.275质量％。
High-resistance and high-corrosion-resistance ceramic material and wafer carrying table
The invention relates to a high-resistance and high-corrosion-resistance ceramic material and a wafer carrying table. The present invention addresses the problem of having sufficient corrosion resistance at high temperatures and increasing the volume resistivity at high temperatures. The high-resistance and high-corrosion-resistance ceramic material contains magnesium-aluminum nitrogen oxide, and the carbon content is 0.005-0.275% by mass.
本发明涉及高电阻高耐腐蚀陶瓷材料及晶片载放台。所要解决的课题是，在高温下具有充分的耐腐蚀性、并且提高高温下的体积电阻率。本发明的高电阻高耐腐蚀陶瓷材料含有镁‑铝氮氧化物，碳含有率为0.005～0.275质量％。
High-resistance and high-corrosion-resistance ceramic material and wafer carrying table
高电阻高耐腐蚀陶瓷材料及晶片载放台
HATTORI AKIYOSHI (author) / UEDA KOJI (author) / NISHIO HITOSHI (author) / MIZOGUCHI TOMOHISA (author)
2023-09-19
Patent
Electronic Resource
Chinese
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