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A platform for research: civil engineering, architecture and urbanism
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE, AND WAFER PLACEMENT TABLE
A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %.
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE, AND WAFER PLACEMENT TABLE
A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %.
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE, AND WAFER PLACEMENT TABLE
HATTORI AKIYOSHI (author) / UEDA KOJI (author) / NISHIO HITOSHI (author) / MIZOGUCHI TOMOHISA (author)
2023-09-21
Patent
Electronic Resource
English
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