A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE AND WAFER PLACEMENT TABLE
본 발명의 고저항·고내식 세라믹스 재료는, 마그네슘-알루미늄 산질화물을 함유하는 것이고, 탄소 함유율이 0.005 내지 0.275질량％인 것이다.
A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %.
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE AND WAFER PLACEMENT TABLE
본 발명의 고저항·고내식 세라믹스 재료는, 마그네슘-알루미늄 산질화물을 함유하는 것이고, 탄소 함유율이 0.005 내지 0.275질량％인 것이다.
A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %.
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE AND WAFER PLACEMENT TABLE
고저항·고내식 세라믹스 재료 및 웨이퍼 적재대
2024-08-23
Patent
Electronic Resource
Korean
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