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High-strength high-purity silicon dioxide ceramic and manufacturing method thereof
Raw material powder of the high-strength and high-purity silicon dioxide ceramic is obtained by grinding high-purity SiO2 prepared by a pyrolysis method, the particle size of the powder is 0.1-80 microns, and the high-strength and high-purity silicon dioxide ceramic is prepared through compression molding, cold isostatic pressing and pressureless sintering in an air atmosphere. According to the invention, a high-purity silicon dioxide ceramic material with strength equivalent to that of quartz glass is prepared at a temperature far lower than that of quartz glass firing, so that the problem that mechanical properties of the existing silicon dioxide ceramic material are weakened due to cristobalite crystallization and low density is solved; therefore, the problem that the quartz glass is used as a high-purity quartz device in the semiconductor photovoltaic industry instead of quartz glass is limited, and the production cost of the semiconductor and photovoltaic industry is greatly reduced.
一种高强度的高纯二氧化硅陶瓷及其制造方法，其原料粉末由热解法制得的高纯SiO2磨细得来，粉末的粒径为0.1～80μm，分别通过模压成型以及冷等静压成型，在空气气氛中无压烧结，依据本发明在远低于石英玻璃烧制的温度下制造了强度与石英玻璃相当的高纯二氧化硅陶瓷材料，解决了现有的二氧化硅陶瓷材料存在的由于方石英析晶以及致密度低而削弱了其力学性能，从而限制了其替代石英玻璃应用于半导体光伏行业作为高纯石英器件的问题，大大降低了半导体及光伏行业的生产成本。
High-strength high-purity silicon dioxide ceramic and manufacturing method thereof
Raw material powder of the high-strength and high-purity silicon dioxide ceramic is obtained by grinding high-purity SiO2 prepared by a pyrolysis method, the particle size of the powder is 0.1-80 microns, and the high-strength and high-purity silicon dioxide ceramic is prepared through compression molding, cold isostatic pressing and pressureless sintering in an air atmosphere. According to the invention, a high-purity silicon dioxide ceramic material with strength equivalent to that of quartz glass is prepared at a temperature far lower than that of quartz glass firing, so that the problem that mechanical properties of the existing silicon dioxide ceramic material are weakened due to cristobalite crystallization and low density is solved; therefore, the problem that the quartz glass is used as a high-purity quartz device in the semiconductor photovoltaic industry instead of quartz glass is limited, and the production cost of the semiconductor and photovoltaic industry is greatly reduced.
一种高强度的高纯二氧化硅陶瓷及其制造方法，其原料粉末由热解法制得的高纯SiO2磨细得来，粉末的粒径为0.1～80μm，分别通过模压成型以及冷等静压成型，在空气气氛中无压烧结，依据本发明在远低于石英玻璃烧制的温度下制造了强度与石英玻璃相当的高纯二氧化硅陶瓷材料，解决了现有的二氧化硅陶瓷材料存在的由于方石英析晶以及致密度低而削弱了其力学性能，从而限制了其替代石英玻璃应用于半导体光伏行业作为高纯石英器件的问题，大大降低了半导体及光伏行业的生产成本。
High-strength high-purity silicon dioxide ceramic and manufacturing method thereof
一种高强度的高纯二氧化硅陶瓷及其制造方法
YANG JIANFENG (author) / LIAN HUANKUI (author) / ZHANG NANLONG (author) / SUN ZHENYU (author) / ZHI QIANG (author) / WANG BO (author) / SHI ZHONGQI (author)
2023-10-13
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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