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Preparation method of carbon/carbon thermal field material deposition and surface pure pyrolytic carbon coating
A carbon/carbon thermal field material deposition and surface pure pyrolytic carbon coating preparation method adopts natural gas to perform diffuse deposition on a carbon/carbon thermal field material, and a pure pyrolytic carbon coating is prepared on the surface of the carbon/carbon thermal field material after heat treatment to prevent direct reaction of silicon steam atmosphere in a furnace and carbon elements on the surface of the carbon/carbon thermal field material, so that the surface pure pyrolytic carbon coating is prepared. The corrosion failure probability of the carbon/carbon composite material for the thermal field is reduced, the service life is prolonged, and higher requirements of the N-type single crystal thermal field can be met. The mechanical property of the densified carbon/carbon thermal field material is adjusted by designing the number of layers of the prefabricated body, the volume density of the prefabricated body, deposition parameters and high-temperature parameters, the compression strength is larger than or equal to 60 MPa, the bending strength is larger than or equal to 60 MPa, and the technical requirements for preparing different carbon/carbon composite material products for an existing thermal field can be met; the problems of deposition densification and surface coating of a carbon/carbon plate, a carbon/carbon cylinder, a carbon/carbon connecting ring, a carbon/carbon cover plate and a carbon/carbon crucible composite material for a thermal field are solved, the preparation process is simple, and the production cost is low.
一种碳/碳热场材料沉积及表面纯热解碳涂层的制备方法，采用天然气对碳/碳热场材料进行弥散式沉积，并在热处理后在碳/碳热场材料表面制备纯热解碳涂层，以阻碍炉内硅蒸气气氛与碳/碳热场材料表面碳元素直接反应，降低热场用碳/碳复合材料腐蚀失效机率，提高使用寿命，可满足N型单晶热场更高需求。本发明通过设计预制体层数、预制体体积密度、沉积参数、高温参数来调整所增密碳/碳热场材料力学性能，压缩强度≥60MPa，抗弯强度≥60MPa，能够满足现有热场用不同碳/碳复合材料产品制备技术需求，解决热场用碳/碳板材、碳/碳筒体、碳/碳连接环、碳/碳盖板、碳/碳坩埚复合材料沉积增密、表面涂层的问题，制备过程简单、生产成本较低。
Preparation method of carbon/carbon thermal field material deposition and surface pure pyrolytic carbon coating
A carbon/carbon thermal field material deposition and surface pure pyrolytic carbon coating preparation method adopts natural gas to perform diffuse deposition on a carbon/carbon thermal field material, and a pure pyrolytic carbon coating is prepared on the surface of the carbon/carbon thermal field material after heat treatment to prevent direct reaction of silicon steam atmosphere in a furnace and carbon elements on the surface of the carbon/carbon thermal field material, so that the surface pure pyrolytic carbon coating is prepared. The corrosion failure probability of the carbon/carbon composite material for the thermal field is reduced, the service life is prolonged, and higher requirements of the N-type single crystal thermal field can be met. The mechanical property of the densified carbon/carbon thermal field material is adjusted by designing the number of layers of the prefabricated body, the volume density of the prefabricated body, deposition parameters and high-temperature parameters, the compression strength is larger than or equal to 60 MPa, the bending strength is larger than or equal to 60 MPa, and the technical requirements for preparing different carbon/carbon composite material products for an existing thermal field can be met; the problems of deposition densification and surface coating of a carbon/carbon plate, a carbon/carbon cylinder, a carbon/carbon connecting ring, a carbon/carbon cover plate and a carbon/carbon crucible composite material for a thermal field are solved, the preparation process is simple, and the production cost is low.
一种碳/碳热场材料沉积及表面纯热解碳涂层的制备方法，采用天然气对碳/碳热场材料进行弥散式沉积，并在热处理后在碳/碳热场材料表面制备纯热解碳涂层，以阻碍炉内硅蒸气气氛与碳/碳热场材料表面碳元素直接反应，降低热场用碳/碳复合材料腐蚀失效机率，提高使用寿命，可满足N型单晶热场更高需求。本发明通过设计预制体层数、预制体体积密度、沉积参数、高温参数来调整所增密碳/碳热场材料力学性能，压缩强度≥60MPa，抗弯强度≥60MPa，能够满足现有热场用不同碳/碳复合材料产品制备技术需求，解决热场用碳/碳板材、碳/碳筒体、碳/碳连接环、碳/碳盖板、碳/碳坩埚复合材料沉积增密、表面涂层的问题，制备过程简单、生产成本较低。
Preparation method of carbon/carbon thermal field material deposition and surface pure pyrolytic carbon coating
一种碳/碳热场材料沉积及表面纯热解碳涂层的制备方法
XUE LIANG (author) / GAO SHUN (author) / GUO XIAOMIN (author) / SHI YUHAO (author) / REN JINWEI (author) / ZHANG LINA (author) / TANGE HITOSHI (author) / QIANG JIANKANG (author)
2024-02-06
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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