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Manufacturing method of ceramic heat exchanger
The invention discloses a manufacturing method of a ceramic heat exchanger, and aims to overcome the defects that a traditional metal heat exchanger is not suitable for being used in a high-temperature environment and is easily corroded by plasma gas. The ceramic heat exchanger is adopted, high temperature resistance and corrosion resistance are achieved, the use temperature can reach 1600 DEG C, and ceramic materials are stable in performance and do not react with process gas. The heat exchange cavity is formed in the ceramic base, and then the ceramic base and the ceramic upper cover are combined to obtain the blank piece. Before the two are combined, graphite is filled in the heat exchanger to form a filling body. And then the graphite is oxidized and volatilized through low-temperature oxidation, so that a heat exchange cavity is formed. The oxidation process is equivalent to one-time low-temperature sintering, so that low-temperature sintering combination of the ceramic base and the ceramic upper cover is realized. And finally, high-temperature sintering is carried out, so that the ceramic base and the ceramic upper cover are completely sintered into a whole, the structural strength is good, and the sealing performance of the heat exchange cavity is good.
本发明公开了一种陶瓷热交换器制作方法，旨在解决传统金属材质热交换器不适用于高温环境使用且容易被等离子气体腐蚀不足。该发明采用陶瓷热交换器，耐高温、耐腐蚀，使用温度可以达到1600℃，而且陶瓷材质性能稳定，不与工艺气体反应。本申请中先在陶瓷基座上开设换热腔，然后将陶瓷基座和陶瓷上盖结合得到毛坯件。在两者结合之前，在换热器内填充石墨形成填充体。之后通过低温氧化使石墨氧化挥发，从而形成换热腔。氧化的过程中相当于经历一次低温烧结，使陶瓷基座和陶瓷上盖实现低温烧结结合。最后再进行高温烧结，使陶瓷基座和陶瓷上盖完全烧结成一个整体，结构强度好，换热腔密封性好。
Manufacturing method of ceramic heat exchanger
The invention discloses a manufacturing method of a ceramic heat exchanger, and aims to overcome the defects that a traditional metal heat exchanger is not suitable for being used in a high-temperature environment and is easily corroded by plasma gas. The ceramic heat exchanger is adopted, high temperature resistance and corrosion resistance are achieved, the use temperature can reach 1600 DEG C, and ceramic materials are stable in performance and do not react with process gas. The heat exchange cavity is formed in the ceramic base, and then the ceramic base and the ceramic upper cover are combined to obtain the blank piece. Before the two are combined, graphite is filled in the heat exchanger to form a filling body. And then the graphite is oxidized and volatilized through low-temperature oxidation, so that a heat exchange cavity is formed. The oxidation process is equivalent to one-time low-temperature sintering, so that low-temperature sintering combination of the ceramic base and the ceramic upper cover is realized. And finally, high-temperature sintering is carried out, so that the ceramic base and the ceramic upper cover are completely sintered into a whole, the structural strength is good, and the sealing performance of the heat exchange cavity is good.
本发明公开了一种陶瓷热交换器制作方法，旨在解决传统金属材质热交换器不适用于高温环境使用且容易被等离子气体腐蚀不足。该发明采用陶瓷热交换器，耐高温、耐腐蚀，使用温度可以达到1600℃，而且陶瓷材质性能稳定，不与工艺气体反应。本申请中先在陶瓷基座上开设换热腔，然后将陶瓷基座和陶瓷上盖结合得到毛坯件。在两者结合之前，在换热器内填充石墨形成填充体。之后通过低温氧化使石墨氧化挥发，从而形成换热腔。氧化的过程中相当于经历一次低温烧结，使陶瓷基座和陶瓷上盖实现低温烧结结合。最后再进行高温烧结，使陶瓷基座和陶瓷上盖完全烧结成一个整体，结构强度好，换热腔密封性好。
Manufacturing method of ceramic heat exchanger
一种陶瓷热交换器制作方法
YAO XIANGMIN (author) / MA YUQI (author) / BANG SUNG-HO (author) / LI QI (author) / FENG ZHIYING (author)
2024-02-27
Patent
Electronic Resource
Chinese
IPC:
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
C04B
Kalk
,
LIME
/
F28F
Einzelheiten von Wärmetauschern oder Wärmeübertragungsvorrichtungen für allgemeine Verwendung
,
DETAILS OF HEAT-EXCHANGE OR HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
HEAT EXCHANGER AND MANUFACTURING METHOD OF HEAT EXCHANGER
| European Patent Office | 2016
| European Patent Office | 2023