A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Preparation method of zinc gallate target material and zinc gallate target material
The invention discloses a preparation method of a zinc gallate target material and the zinc gallate target material, and the preparation method of the zinc gallate target material comprises the following steps: 1) mixing zinc oxide powder and gallium oxide powder to obtain mixed powder, mixing the mixed powder with a solvent, and performing ball milling to obtain slurry; 2) drying the slurry, and grinding the slurry into powder; (3) pressing the powder into a biscuit; (4) the biscuit is sintered for the first time at the temperature of 1250-1650 DEG C, and a semi-finished product target material is obtained; and (5) the semi-finished product target material is inverted for secondary sintering, the zinc gallate target material is obtained, the secondary sintering temperature ranges from 800 DEG C to 1300 DEG C, and the secondary sintering temperature is smaller than the primary sintering temperature. After the target material is sintered for the first time, the zinc-rich surface of the target material is upwards subjected to high-temperature sintering for the second time, so that the components of the zinc gallate target material are more uniformly distributed, the crystal quality and the process stability of an oxide film using the zinc gallate target material are improved, and the zinc gallate target material is suitable for industrial production.
本发明公开了一种镓酸锌靶材的制备方法和镓酸锌靶材，镓酸锌靶材的制备方法包括步骤1)：将氧化锌粉末和氧化镓粉末混合得到混合粉末，将混合粉末与溶剂混合后，通过球磨获得浆料；步骤2)：将浆料烘干，研磨成粉末；步骤3)：将粉末压制成素坯；步骤4)：将素坯进行第一次烧结，得半成品靶材，第一次烧结温度为1250～1650℃；步骤5)：将半成品靶材倒置进行第二次烧结，得镓酸锌靶材，第二次烧结温度为800～1300℃且第二次烧结温度小于第一次烧结温度。本申请在靶材第一次烧结后，将靶材富锌面朝上进行第二次高温烧结，使镓酸锌靶材组分分布更均匀，使用该镓酸锌靶材的氧化物薄膜晶体质量和工艺稳定性得到提高，适用于工业化生产。
Preparation method of zinc gallate target material and zinc gallate target material
The invention discloses a preparation method of a zinc gallate target material and the zinc gallate target material, and the preparation method of the zinc gallate target material comprises the following steps: 1) mixing zinc oxide powder and gallium oxide powder to obtain mixed powder, mixing the mixed powder with a solvent, and performing ball milling to obtain slurry; 2) drying the slurry, and grinding the slurry into powder; (3) pressing the powder into a biscuit; (4) the biscuit is sintered for the first time at the temperature of 1250-1650 DEG C, and a semi-finished product target material is obtained; and (5) the semi-finished product target material is inverted for secondary sintering, the zinc gallate target material is obtained, the secondary sintering temperature ranges from 800 DEG C to 1300 DEG C, and the secondary sintering temperature is smaller than the primary sintering temperature. After the target material is sintered for the first time, the zinc-rich surface of the target material is upwards subjected to high-temperature sintering for the second time, so that the components of the zinc gallate target material are more uniformly distributed, the crystal quality and the process stability of an oxide film using the zinc gallate target material are improved, and the zinc gallate target material is suitable for industrial production.
本发明公开了一种镓酸锌靶材的制备方法和镓酸锌靶材，镓酸锌靶材的制备方法包括步骤1)：将氧化锌粉末和氧化镓粉末混合得到混合粉末，将混合粉末与溶剂混合后，通过球磨获得浆料；步骤2)：将浆料烘干，研磨成粉末；步骤3)：将粉末压制成素坯；步骤4)：将素坯进行第一次烧结，得半成品靶材，第一次烧结温度为1250～1650℃；步骤5)：将半成品靶材倒置进行第二次烧结，得镓酸锌靶材，第二次烧结温度为800～1300℃且第二次烧结温度小于第一次烧结温度。本申请在靶材第一次烧结后，将靶材富锌面朝上进行第二次高温烧结，使镓酸锌靶材组分分布更均匀，使用该镓酸锌靶材的氧化物薄膜晶体质量和工艺稳定性得到提高，适用于工业化生产。
Preparation method of zinc gallate target material and zinc gallate target material
一种镓酸锌靶材的制备方法和镓酸锌靶材
HAN DONGYANG (author) / ZHANG WENRUI (author) / HU SHUDONG (author) / LIU KAISEN (author) / YE JICHUN (author)
2024-03-05
Patent
Electronic Resource
Chinese
Zinc telluride zinc-doped plane target material and preparation method thereof
| European Patent Office | 2021
Preparation method of conductive zinc telluride target material
| European Patent Office | 2021
Zinc oxide target material and preparation method thereof
| European Patent Office | 2024
Preparation method of tellurium-zinc-cadmium target material
| European Patent Office | 2021
Preparation method of aluminum zinc oxide target material
| European Patent Office | 2021