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Preparation method of aluminum zinc oxide target material
The invention provides a preparation method of an aluminum zinc oxide target material. The preparation method comprises the following steps: (1) preparing zinc oxide, aluminum oxide, a dispersing agent, a binder and water into mixed slurry, defoaming, and controlling the average particle size and the particle size uniformity of zinc oxide and aluminum oxide in the slurry; (2) carrying out spray granulation and mixing on the mixed slurry obtained in the step (1), and controlling the average particle size and the particle size uniformity of aluminum zinc oxide powder; (3) carrying out pressure forming on the aluminum zinc oxide powder obtained in the step (2) to obtain an aluminum zinc oxide target blank; and (4) sintering the aluminum zinc oxide target blank obtained in the step (3) at 1300-1500 DEG C. According to the preparation method of the aluminum zinc oxide target material, zinc oxide, aluminum oxide, a dispersing agent and a binder are prepared into slurry, the slurry is subjected to spray granulation and pressed into the target blank, the quality of the aluminum zinc oxide target material is remarkably improved by controlling the particle sizes and uniformity of aluminum zinc oxide powder, aluminum oxide and zinc oxide, and the component uniformity of the aluminum zinc oxide target material is improved.
本发明提供一种氧化锌铝靶材的制备方法，包括步骤：(1)将氧化锌、氧化铝、分散剂、粘结剂和水制备为混合浆料并消泡；并且控制浆料中氧化锌、氧化铝的平均粒径和粒径均一性；(2)将步骤(1)得到的混合浆料进行喷雾造粒，混料，并且控制氧化锌铝粉末的平均粒径和粒径均一性；(3)将步骤(2)得到的氧化锌铝粉末压力成型得到氧化锌铝靶坯；(4)将步骤(3)得到的氧化锌铝靶坯于1300～1500℃烧结。本发明的氧化锌铝靶材的制备方法通过将氧化锌、氧化铝与分散剂、粘结剂制备为浆料，并且喷雾造粒并压制靶坯，通过控制氧化锌铝粉末、氧化铝、氧化锌的粒径以及均匀性显著改善了氧化锌铝靶材的品质，提高了氧化锌铝靶材的成分均匀性。
Preparation method of aluminum zinc oxide target material
The invention provides a preparation method of an aluminum zinc oxide target material. The preparation method comprises the following steps: (1) preparing zinc oxide, aluminum oxide, a dispersing agent, a binder and water into mixed slurry, defoaming, and controlling the average particle size and the particle size uniformity of zinc oxide and aluminum oxide in the slurry; (2) carrying out spray granulation and mixing on the mixed slurry obtained in the step (1), and controlling the average particle size and the particle size uniformity of aluminum zinc oxide powder; (3) carrying out pressure forming on the aluminum zinc oxide powder obtained in the step (2) to obtain an aluminum zinc oxide target blank; and (4) sintering the aluminum zinc oxide target blank obtained in the step (3) at 1300-1500 DEG C. According to the preparation method of the aluminum zinc oxide target material, zinc oxide, aluminum oxide, a dispersing agent and a binder are prepared into slurry, the slurry is subjected to spray granulation and pressed into the target blank, the quality of the aluminum zinc oxide target material is remarkably improved by controlling the particle sizes and uniformity of aluminum zinc oxide powder, aluminum oxide and zinc oxide, and the component uniformity of the aluminum zinc oxide target material is improved.
本发明提供一种氧化锌铝靶材的制备方法，包括步骤：(1)将氧化锌、氧化铝、分散剂、粘结剂和水制备为混合浆料并消泡；并且控制浆料中氧化锌、氧化铝的平均粒径和粒径均一性；(2)将步骤(1)得到的混合浆料进行喷雾造粒，混料，并且控制氧化锌铝粉末的平均粒径和粒径均一性；(3)将步骤(2)得到的氧化锌铝粉末压力成型得到氧化锌铝靶坯；(4)将步骤(3)得到的氧化锌铝靶坯于1300～1500℃烧结。本发明的氧化锌铝靶材的制备方法通过将氧化锌、氧化铝与分散剂、粘结剂制备为浆料，并且喷雾造粒并压制靶坯，通过控制氧化锌铝粉末、氧化铝、氧化锌的粒径以及均匀性显著改善了氧化锌铝靶材的品质，提高了氧化锌铝靶材的成分均匀性。
Preparation method of aluminum zinc oxide target material
一种氧化锌铝靶材的制备方法
LI KAIJIE (author) / SHAO XUELIANG (author) / ZHANG LAIWEN (author) / ZHU LIU (author)
2021-08-06
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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