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Ceramic target material for alkali metal niobate sputtering and preparation method thereof
The chemical composition of the ceramic target material is (AxBy) NbO3, x is more than or equal to 0 and less than or equal to 1, y is more than or equal to 0 and less than or equal to 1, and x + y is more than or equal to 1; the raw materials comprise inorganic acid salt A, inorganic acid salt B and niobium metal oxide; wherein the molar ratio of the inorganic acid salt A to the whole raw material is x/(x + y + 1), the molar ratio of the inorganic acid salt B to the whole raw material is y/(x + y + 1), and the molar ratio of the raw material niobium metal oxide to the whole raw material is 1/(x + y + 1); when the ceramic target material is prepared, a mixture containing inorganic acid salt and niobium metal oxide is sequentially subjected to primary presintering, secondary presintering and third presintering, and ceramic powder is obtained; the pre-sintering temperature is controlled; carrying out hot pressing sintering treatment on the ceramic powder in inert atmosphere or vacuum, and then carrying out annealing treatment in oxygen-containing gas to obtain the ceramic target material for sputtering the alkali metal niobate, the prepared ceramic target material for alkali metal niobate sputtering has the advantages of higher density and component uniformity, accurate chemical component proportion, no cracking deformation, regular shape and no need of subsequent rolling treatment, and the preparation method has the advantages of simple process, high yield and low cost.
一种碱金属铌酸盐溅射用陶瓷靶材及其制备方法，所述陶瓷靶材的化学组成为(AxBy)NbO3，其中0≤x≤1，0≤y≤1，x+y≥1；原料包括无机酸盐A、无机酸盐B及铌金属氧化物；其中，无机酸盐A占原料整体的摩尔比例为x/(x+y+1)，无机酸盐B占原料整体的摩尔比例为y/(x+y+1)，原料铌金属氧化物占原料整体的摩尔比例为1/(x+y+1)；制备陶瓷靶材时将包含无机酸盐和铌金属氧化物的混合物依次进行一次预烧、二次预烧和三次预烧，得到陶瓷粉体；通过控制预烧的温度；使陶瓷粉体在惰性气氛或真空下进行热压烧结处理后，再在含氧气体下进行退火处理，得到碱金属铌酸盐溅射用陶瓷靶材；制备得到的碱金属铌酸盐溅射用陶瓷靶材具有较高的致密度与成分均匀性、精确的化学成分配比，并且无开裂变形，形状规整无需后续滚圆处理，本发明具有工艺简单、成品率高且成本低的优点。
Ceramic target material for alkali metal niobate sputtering and preparation method thereof
The chemical composition of the ceramic target material is (AxBy) NbO3, x is more than or equal to 0 and less than or equal to 1, y is more than or equal to 0 and less than or equal to 1, and x + y is more than or equal to 1; the raw materials comprise inorganic acid salt A, inorganic acid salt B and niobium metal oxide; wherein the molar ratio of the inorganic acid salt A to the whole raw material is x/(x + y + 1), the molar ratio of the inorganic acid salt B to the whole raw material is y/(x + y + 1), and the molar ratio of the raw material niobium metal oxide to the whole raw material is 1/(x + y + 1); when the ceramic target material is prepared, a mixture containing inorganic acid salt and niobium metal oxide is sequentially subjected to primary presintering, secondary presintering and third presintering, and ceramic powder is obtained; the pre-sintering temperature is controlled; carrying out hot pressing sintering treatment on the ceramic powder in inert atmosphere or vacuum, and then carrying out annealing treatment in oxygen-containing gas to obtain the ceramic target material for sputtering the alkali metal niobate, the prepared ceramic target material for alkali metal niobate sputtering has the advantages of higher density and component uniformity, accurate chemical component proportion, no cracking deformation, regular shape and no need of subsequent rolling treatment, and the preparation method has the advantages of simple process, high yield and low cost.
一种碱金属铌酸盐溅射用陶瓷靶材及其制备方法，所述陶瓷靶材的化学组成为(AxBy)NbO3，其中0≤x≤1，0≤y≤1，x+y≥1；原料包括无机酸盐A、无机酸盐B及铌金属氧化物；其中，无机酸盐A占原料整体的摩尔比例为x/(x+y+1)，无机酸盐B占原料整体的摩尔比例为y/(x+y+1)，原料铌金属氧化物占原料整体的摩尔比例为1/(x+y+1)；制备陶瓷靶材时将包含无机酸盐和铌金属氧化物的混合物依次进行一次预烧、二次预烧和三次预烧，得到陶瓷粉体；通过控制预烧的温度；使陶瓷粉体在惰性气氛或真空下进行热压烧结处理后，再在含氧气体下进行退火处理，得到碱金属铌酸盐溅射用陶瓷靶材；制备得到的碱金属铌酸盐溅射用陶瓷靶材具有较高的致密度与成分均匀性、精确的化学成分配比，并且无开裂变形，形状规整无需后续滚圆处理，本发明具有工艺简单、成品率高且成本低的优点。
Ceramic target material for alkali metal niobate sputtering and preparation method thereof
一种碱金属铌酸盐溅射用陶瓷靶材及其制备方法
WU HAIJUN (author) / PENG GUYANG (author) / YANG YUXUAN (author) / LU BOCHEN (author) / ZHOU XIANGHONG (author)
2024-05-10
Patent
Electronic Resource
Chinese
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