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Preparation method of oxide target material and praseodymium-doped IGZO oxide target material
The invention relates to the technical field of target materials, and particularly discloses a preparation method of an oxide target material and a praseodymium-doped IGZO oxide target material. According to the method, praseodymium oxide is generated in the target blank through thermal decomposition of praseodymium nitrate, and the oxide target with the higher praseodymium oxide content is obtained. Along with the increase of the praseodymium oxide content, the total amount of the positive tetravalent praseodymium in the oxide target material is also increased, and the positive tetravalent praseodymium can improve the carrier mobility of the IGZO target material, so that the performance requirements of new products can be fully met.
本申请涉及靶材技术领域，具体公开了一种氧化物靶材的制备方法以及镨掺杂IGZO氧化物靶材。本申请的方法通过硝酸镨的受热分解使得靶材坯体中产生了氧化镨，得到了氧化镨含量更高的氧化物靶材。随着氧化镨含量的增加，氧化物靶材中的正四价镨的总量也随之上升，而正四价镨能够改善IGZO靶材的载流子迁移率，因而有助于充分满足新产品的性能需求。
Preparation method of oxide target material and praseodymium-doped IGZO oxide target material
The invention relates to the technical field of target materials, and particularly discloses a preparation method of an oxide target material and a praseodymium-doped IGZO oxide target material. According to the method, praseodymium oxide is generated in the target blank through thermal decomposition of praseodymium nitrate, and the oxide target with the higher praseodymium oxide content is obtained. Along with the increase of the praseodymium oxide content, the total amount of the positive tetravalent praseodymium in the oxide target material is also increased, and the positive tetravalent praseodymium can improve the carrier mobility of the IGZO target material, so that the performance requirements of new products can be fully met.
本申请涉及靶材技术领域，具体公开了一种氧化物靶材的制备方法以及镨掺杂IGZO氧化物靶材。本申请的方法通过硝酸镨的受热分解使得靶材坯体中产生了氧化镨，得到了氧化镨含量更高的氧化物靶材。随着氧化镨含量的增加，氧化物靶材中的正四价镨的总量也随之上升，而正四价镨能够改善IGZO靶材的载流子迁移率，因而有助于充分满足新产品的性能需求。
Preparation method of oxide target material and praseodymium-doped IGZO oxide target material
一种氧化物靶材的制备方法以及镨掺杂IGZO氧化物靶材
GE CHUNQIAO (author) / LI QIANG (author) / ZHONG WEIPING (author) / GAO YANG (author)
2024-05-31
Patent
Electronic Resource
Chinese
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