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Silicon carbide hollow structural body as well as preparation method and application thereof
The invention relates to a silicon-silicon carbide hollow structure and a preparation method and application thereof, the preparation method of the silicon-silicon carbide hollow structure comprises the following steps: (1) uniformly mixing silicon powder and silicon carbide powder, and carrying out molding treatment on the obtained mixed powder to obtain a silicon-silicon carbide blank; and (2) processing the two silicon-silicon carbide blanks obtained in the step (1), filling into a die, then carrying out hot-pressing diffusion welding, and carrying out post-treatment on the obtained combined body to obtain the silicon-silicon carbide hollow structural body. Integrated forming of a complex special-shaped hollow structure is achieved, meanwhile, the deformation amount after hot-pressing diffusion welding is reduced, the strength of a welding joint is high, and the requirement for serving as a structural part for integrated circuit equipment or a material for a photovoltaic chip can be met.
本发明涉及一种硅碳化硅中空结构体及其制备方法与应用,所述硅碳化硅中空结构体的制备方法包括如下步骤:(1)均匀混合硅粉与碳化硅粉,所得混合粉经成型处理,得到硅‑碳化硅坯料;(2)将两块步骤(1)所得硅‑碳化硅坯料加工后装模,然后进行热压扩散焊接,所得组合体经后处理,得到所述硅碳化硅中空结构体。本发明实现了复杂异形中空结构的一体成型,同时使得热压扩散焊接后形变量减小,焊接接头强度较高,能够满足作为集成电路设备用结构件或光伏芯片用材的要求。
Silicon carbide hollow structural body as well as preparation method and application thereof
The invention relates to a silicon-silicon carbide hollow structure and a preparation method and application thereof, the preparation method of the silicon-silicon carbide hollow structure comprises the following steps: (1) uniformly mixing silicon powder and silicon carbide powder, and carrying out molding treatment on the obtained mixed powder to obtain a silicon-silicon carbide blank; and (2) processing the two silicon-silicon carbide blanks obtained in the step (1), filling into a die, then carrying out hot-pressing diffusion welding, and carrying out post-treatment on the obtained combined body to obtain the silicon-silicon carbide hollow structural body. Integrated forming of a complex special-shaped hollow structure is achieved, meanwhile, the deformation amount after hot-pressing diffusion welding is reduced, the strength of a welding joint is high, and the requirement for serving as a structural part for integrated circuit equipment or a material for a photovoltaic chip can be met.
本发明涉及一种硅碳化硅中空结构体及其制备方法与应用,所述硅碳化硅中空结构体的制备方法包括如下步骤:(1)均匀混合硅粉与碳化硅粉,所得混合粉经成型处理,得到硅‑碳化硅坯料;(2)将两块步骤(1)所得硅‑碳化硅坯料加工后装模,然后进行热压扩散焊接,所得组合体经后处理,得到所述硅碳化硅中空结构体。本发明实现了复杂异形中空结构的一体成型,同时使得热压扩散焊接后形变量减小,焊接接头强度较高,能够满足作为集成电路设备用结构件或光伏芯片用材的要求。
Silicon carbide hollow structural body as well as preparation method and application thereof
一种硅碳化硅中空结构体及其制备方法与应用
YAO LIJUN (author) / GAO XIONG (author) / WANG JUBAO (author) / WANG KE (author) / ZHOU MIN (author)
2024-06-21
Patent
Electronic Resource
Chinese
IPC:
C04B
Kalk
,
LIME
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