A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
The invention discloses a method for preparing a silicon carbide boat through secondary sintering, and relates to the technical field of silicon carbide boats. The method specifically comprises the steps that all silicon carbide accessories are flatly laid in a high-temperature sintering furnace, monocrystalline silicon is laid on the surfaces, and high-temperature sintering is conducted; the sintered silicon carbide accessory is subjected to sand blasting and grinding, and the silicon carbide accessory qualified through inspection is taken for standby application; qualified silicon carbide accessories are placed according to the designed structure and bonded through a binder, the whole silicon carbide accessories are placed in a drying room to be dried after being bonded and then placed in a high-temperature sintering furnace, monocrystalline silicon is spread on the bonding portion, secondary sintering is conducted, and the qualified silicon carbide boat is obtained. A secondary sintering mode is adopted, the silicon carbide accessories are subjected to primary sintering, then the qualified silicon carbide accessories are placed and bonded by using an adhesive, and then the whole silicon carbide boat is subjected to secondary sintering, so that the problem that the bonding part is cracked due to shrinkage of the silicon carbide accessories when the silicon carbide accessories are assembled and bonded firstly and then sintered at high temperature is solved, and the service life of the silicon carbide boat is prolonged. And the yield of the silicon carbide boat is greatly improved.
本发明公开了一种二次烧结制备碳化硅晶舟的方法，涉及碳化硅晶舟技术领域。方法具体为将各碳化硅配件在高温烧结炉中平铺，在表面铺洒单晶硅并高温烧结；将烧结结束后的碳化硅配件喷砂打磨，取检验合格的碳化硅配件备用；将合格的碳化硅配件按设计结构进行摆放，并用粘结剂进行粘接，粘接后整体置于烘干房烘干后，放入高温烧结炉，在粘接部位铺洒单晶硅，进行二次烧结，得到合格的碳化硅晶舟。采用二次烧结的方式，先对碳化硅配件进行一次烧结，然后将合格碳化硅配件摆放好后使用粘接剂粘接，再将整个碳化硅晶舟进行二次烧结，避免了先组装粘接再高温高温烧结时因碳化硅配件收缩导致的粘接处开裂的问题，大大提高了碳化硅晶舟的良品率。
The invention discloses a method for preparing a silicon carbide boat through secondary sintering, and relates to the technical field of silicon carbide boats. The method specifically comprises the steps that all silicon carbide accessories are flatly laid in a high-temperature sintering furnace, monocrystalline silicon is laid on the surfaces, and high-temperature sintering is conducted; the sintered silicon carbide accessory is subjected to sand blasting and grinding, and the silicon carbide accessory qualified through inspection is taken for standby application; qualified silicon carbide accessories are placed according to the designed structure and bonded through a binder, the whole silicon carbide accessories are placed in a drying room to be dried after being bonded and then placed in a high-temperature sintering furnace, monocrystalline silicon is spread on the bonding portion, secondary sintering is conducted, and the qualified silicon carbide boat is obtained. A secondary sintering mode is adopted, the silicon carbide accessories are subjected to primary sintering, then the qualified silicon carbide accessories are placed and bonded by using an adhesive, and then the whole silicon carbide boat is subjected to secondary sintering, so that the problem that the bonding part is cracked due to shrinkage of the silicon carbide accessories when the silicon carbide accessories are assembled and bonded firstly and then sintered at high temperature is solved, and the service life of the silicon carbide boat is prolonged. And the yield of the silicon carbide boat is greatly improved.
本发明公开了一种二次烧结制备碳化硅晶舟的方法，涉及碳化硅晶舟技术领域。方法具体为将各碳化硅配件在高温烧结炉中平铺，在表面铺洒单晶硅并高温烧结；将烧结结束后的碳化硅配件喷砂打磨，取检验合格的碳化硅配件备用；将合格的碳化硅配件按设计结构进行摆放，并用粘结剂进行粘接，粘接后整体置于烘干房烘干后，放入高温烧结炉，在粘接部位铺洒单晶硅，进行二次烧结，得到合格的碳化硅晶舟。采用二次烧结的方式，先对碳化硅配件进行一次烧结，然后将合格碳化硅配件摆放好后使用粘接剂粘接，再将整个碳化硅晶舟进行二次烧结，避免了先组装粘接再高温高温烧结时因碳化硅配件收缩导致的粘接处开裂的问题，大大提高了碳化硅晶舟的良品率。
Method for preparing silicon carbide boat through secondary sintering
一种二次烧结制备碳化硅晶舟的方法
2024-07-05
Patent
Electronic Resource
Chinese
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