A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Film-coated silicon nitride ceramic and preparation method thereof
The invention relates to coated silicon nitride ceramic which comprises a silicon nitride ceramic substrate and a composite film covering the silicon nitride ceramic substrate, and the composite film is composed of a diamond film prepared through hot filament chemical vapor deposition and a MoS2-TiN film prepared through a physical vapor deposition system. The composite film composed of the diamond film and the MoS2-TiN film is formed on the surface of the silicon nitride ceramic, so that the hardness, wear resistance, thermal conductivity and self-lubrication of the silicon nitride ceramic are improved, and the hardness, high-temperature oxidation resistance and friction resistance of the composite film are improved. The method can be used for preparing the vacuum silicon nitride ceramic self-lubricating bearing.
本发明涉及一种覆膜氮化硅陶瓷，其包括氮化硅陶瓷基体和覆盖在氮化硅陶瓷基体上的复合膜，所述复合膜由热丝化学气相沉积制备的金刚石膜和物理气相沉积系统制备的MoS2‑TiN膜所组成。通过在氮化硅陶瓷表面形成由金刚石膜和MoS2‑TiN膜组成的复合膜，进而提升氮化硅陶瓷的硬度、耐磨性、导热性和自润滑性，改善复合膜的硬度、抗高温氧化性和耐摩擦性能。本发明可应用制备真空氮化硅陶瓷自润滑轴承。
Film-coated silicon nitride ceramic and preparation method thereof
The invention relates to coated silicon nitride ceramic which comprises a silicon nitride ceramic substrate and a composite film covering the silicon nitride ceramic substrate, and the composite film is composed of a diamond film prepared through hot filament chemical vapor deposition and a MoS2-TiN film prepared through a physical vapor deposition system. The composite film composed of the diamond film and the MoS2-TiN film is formed on the surface of the silicon nitride ceramic, so that the hardness, wear resistance, thermal conductivity and self-lubrication of the silicon nitride ceramic are improved, and the hardness, high-temperature oxidation resistance and friction resistance of the composite film are improved. The method can be used for preparing the vacuum silicon nitride ceramic self-lubricating bearing.
本发明涉及一种覆膜氮化硅陶瓷，其包括氮化硅陶瓷基体和覆盖在氮化硅陶瓷基体上的复合膜，所述复合膜由热丝化学气相沉积制备的金刚石膜和物理气相沉积系统制备的MoS2‑TiN膜所组成。通过在氮化硅陶瓷表面形成由金刚石膜和MoS2‑TiN膜组成的复合膜，进而提升氮化硅陶瓷的硬度、耐磨性、导热性和自润滑性，改善复合膜的硬度、抗高温氧化性和耐摩擦性能。本发明可应用制备真空氮化硅陶瓷自润滑轴承。
Film-coated silicon nitride ceramic and preparation method thereof
一种覆膜氮化硅陶瓷及其制备方法
LU FENG (author) / ZHANG TING (author) / BAI XU (author) / WU YUHOU (author) / ZHANG HE (author) / KO JUN-YEON (author)
2024-07-09
Patent
Electronic Resource
Chinese
Multilayer metal film-coated silicon nitride ceramic substrate and preparation method thereof
| European Patent Office | 2021
Silicon nitride ceramic slurry, silicon nitride ceramic substrate and preparation method thereof
| European Patent Office | 2024
Silicon nitride powder, preparation method thereof and silicon nitride ceramic
| European Patent Office | 2024
| European Patent Office | 2023