A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Rare earth barium copper oxide superconducting target material and preparation method thereof
The embodiment of the invention discloses a rare earth barium copper oxide superconducting target material and a preparation method thereof. The preparation method comprises the following steps: S1, mixing rare earth oxide powder, barium oxide powder and copper oxide powder according to a set proportion to obtain first mixed powder; s2, calcining the first mixed powder to obtain second mixed powder; s3, carrying out ball-milling mixing on the second mixed powder and a binder, and carrying out compression molding to obtain a target material biscuit; and S4, performing degreasing and sintering integrated treatment on the target material biscuit, and performing hot pressing to obtain the rare earth barium copper oxide superconducting target material. In the rare earth barium copper oxide superconductive target material, the rare earth barium copper oxide ReBa2Cu3O7 is the only superconductive phase, the secondary phase CuO is uniformly dispersed between the main phases, the structure is uniform, the density of the rare earth barium copper oxide superconductive target material is as high as 99.6%, and the rare earth barium copper oxide superconductive target material has wide application prospects in the fields of rare earth barium copper oxide sputtering target materials and preparation thereof.
本发明实施例公开了稀土钡铜氧化物超导靶材及其制备方法；制备方法包括步骤：S1、稀土氧化物粉体、氧化钡粉体、氧化铜粉体按照设定比例混合，得到第一混合粉体；S2、煅烧第一混合粉体，得到第二混合粉体；S3、第二混合粉体与粘结剂球磨混合，模压成型，得到靶材素坯；S4、将靶材素坯脱脂烧结一体化处理，热压得到稀土钡铜氧化物超导靶材。稀土钡铜氧化物超导靶材中，稀土钡铜氧化物ReBa2Cu3O7为唯一超导相，二次相CuO均匀分散在主相之间，组织均匀，稀土钡铜氧化物超导靶材的致密度高达99.6％，在稀土钡铜氧化物溅射靶材及其制备领域有广泛应用前景。
Rare earth barium copper oxide superconducting target material and preparation method thereof
The embodiment of the invention discloses a rare earth barium copper oxide superconducting target material and a preparation method thereof. The preparation method comprises the following steps: S1, mixing rare earth oxide powder, barium oxide powder and copper oxide powder according to a set proportion to obtain first mixed powder; s2, calcining the first mixed powder to obtain second mixed powder; s3, carrying out ball-milling mixing on the second mixed powder and a binder, and carrying out compression molding to obtain a target material biscuit; and S4, performing degreasing and sintering integrated treatment on the target material biscuit, and performing hot pressing to obtain the rare earth barium copper oxide superconducting target material. In the rare earth barium copper oxide superconductive target material, the rare earth barium copper oxide ReBa2Cu3O7 is the only superconductive phase, the secondary phase CuO is uniformly dispersed between the main phases, the structure is uniform, the density of the rare earth barium copper oxide superconductive target material is as high as 99.6%, and the rare earth barium copper oxide superconductive target material has wide application prospects in the fields of rare earth barium copper oxide sputtering target materials and preparation thereof.
本发明实施例公开了稀土钡铜氧化物超导靶材及其制备方法；制备方法包括步骤：S1、稀土氧化物粉体、氧化钡粉体、氧化铜粉体按照设定比例混合，得到第一混合粉体；S2、煅烧第一混合粉体，得到第二混合粉体；S3、第二混合粉体与粘结剂球磨混合，模压成型，得到靶材素坯；S4、将靶材素坯脱脂烧结一体化处理，热压得到稀土钡铜氧化物超导靶材。稀土钡铜氧化物超导靶材中，稀土钡铜氧化物ReBa2Cu3O7为唯一超导相，二次相CuO均匀分散在主相之间，组织均匀，稀土钡铜氧化物超导靶材的致密度高达99.6％，在稀土钡铜氧化物溅射靶材及其制备领域有广泛应用前景。
Rare earth barium copper oxide superconducting target material and preparation method thereof
稀土钡铜氧化物超导靶材及其制备方法
ZHU LIN (author) / SUN BENSHUANG (author)
2024-08-30
Patent
Electronic Resource
Chinese
| European Patent Office | 2020
Rare earth doped IZO oxide target material and preparation method thereof
| European Patent Office | 2024
| European Patent Office | 2024
| European Patent Office | 2023