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Preparation method of europium-barium-copper oxide superconducting sputtering target material and product of europium-barium-copper oxide superconducting sputtering target material
The invention discloses a preparation method of a europium-barium-copper oxide superconducting sputtering target material and a product thereof, and belongs to the technical field of superconducting materials. The preparation method comprises the following steps: mixing europium oxide powder, barium carbonate powder and copper oxide powder according to a molar ratio of 1: 4: 6 to obtain first mixed powder, and calcining the first mixed powder to obtain second mixed powder; and mixing the second mixed powder with a dispersant, a binder and water to obtain europium-barium-copper oxide slurry, carrying out pressure slip casting to obtain a europium-barium-copper oxide target material biscuit, and carrying out drying treatment and degreasing sintering treatment to obtain the europium-barium-copper oxide superconducting sputtering target material. The oxide powder in the europium-barium-copper oxide target material biscuit forms main phases through the degreasing and sintering process, the secondary phase CuO is uniformly dispersed among the main phases, the europium-barium-copper oxide superconducting sputtering target material with a uniform structure is obtained, crystal grains are in close contact, and the structural compactness degree is high.
本发明公开了一种铕钡铜氧化物超导溅射靶材的制备方法及其产品，属于超导材料技术领域。本发明将氧化铕粉体、碳酸钡粉体与氧化铜粉体按1:4:6的摩尔比混合，得到第一混合粉体，经煅烧处理得到第二混合粉体；将第二混合粉体与分散剂、粘结剂和水混合，得到铕钡铜氧化物浆料，经压力注浆成型得到铕钡铜氧化物靶材素坯，再经干燥处理和脱脂烧结处理，得到铕钡铜氧化物超导溅射靶材。本发明铕钡铜氧化物靶材素坯中的氧化物粉体经过脱脂烧结过程形成主相，二次相CuO均匀分散在主相之间，得到了组织均匀的铕钡铜氧化物超导溅射靶材，晶粒之间紧密接触，结构致密程度高。
Preparation method of europium-barium-copper oxide superconducting sputtering target material and product of europium-barium-copper oxide superconducting sputtering target material
The invention discloses a preparation method of a europium-barium-copper oxide superconducting sputtering target material and a product thereof, and belongs to the technical field of superconducting materials. The preparation method comprises the following steps: mixing europium oxide powder, barium carbonate powder and copper oxide powder according to a molar ratio of 1: 4: 6 to obtain first mixed powder, and calcining the first mixed powder to obtain second mixed powder; and mixing the second mixed powder with a dispersant, a binder and water to obtain europium-barium-copper oxide slurry, carrying out pressure slip casting to obtain a europium-barium-copper oxide target material biscuit, and carrying out drying treatment and degreasing sintering treatment to obtain the europium-barium-copper oxide superconducting sputtering target material. The oxide powder in the europium-barium-copper oxide target material biscuit forms main phases through the degreasing and sintering process, the secondary phase CuO is uniformly dispersed among the main phases, the europium-barium-copper oxide superconducting sputtering target material with a uniform structure is obtained, crystal grains are in close contact, and the structural compactness degree is high.
本发明公开了一种铕钡铜氧化物超导溅射靶材的制备方法及其产品，属于超导材料技术领域。本发明将氧化铕粉体、碳酸钡粉体与氧化铜粉体按1:4:6的摩尔比混合，得到第一混合粉体，经煅烧处理得到第二混合粉体；将第二混合粉体与分散剂、粘结剂和水混合，得到铕钡铜氧化物浆料，经压力注浆成型得到铕钡铜氧化物靶材素坯，再经干燥处理和脱脂烧结处理，得到铕钡铜氧化物超导溅射靶材。本发明铕钡铜氧化物靶材素坯中的氧化物粉体经过脱脂烧结过程形成主相，二次相CuO均匀分散在主相之间，得到了组织均匀的铕钡铜氧化物超导溅射靶材，晶粒之间紧密接触，结构致密程度高。
Preparation method of europium-barium-copper oxide superconducting sputtering target material and product of europium-barium-copper oxide superconducting sputtering target material
一种铕钡铜氧化物超导溅射靶材的制备方法及其产品
LIU YANG (author) / ZHANG WENYU (author) / SUN BENSHUANG (author) / WANG CHENGDUO (author) / ZENG XUEYUN (author)
2023-08-18
Patent
Electronic Resource
Chinese
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